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七态射频微机电系统小型化宽带可重构步进衰减器

The Seven-State RF MEMS Miniaturized Broadband Reconfigurable Step Attenuator.

作者信息

Si Yuheng, Chen Siming, Fu Peifang, Yu Jian, Ma Binyi, Wu Qiannan, Li Mengwei

机构信息

School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2024 Sep 24;15(10):1182. doi: 10.3390/mi15101182.

DOI:10.3390/mi15101182
PMID:39459056
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509362/
Abstract

This paper presents a three-channel reconfigurable step attenuator based on radio frequency (RF) microelectromechanical system (MEMS) switches, in response to the current issues of high insertion loss and low attenuation accuracy of attenuators. The coplanar waveguide (CPW), cross-shaped power dividers, RF MEMS switches, and π-type attenuation resistor networks are designed as a basic unit of the attenuator. The attenuator implemented attenuation of 030 dB at 5 dB intervals in the frequency range of 125 GHz through two basic units. The results show that the insertion loss is less than 1.41 dB, the attenuation accuracy is better than 2.48 dB, and the geometric size is 2.4 mm × 4.0 mm × 0.7 mm. The attenuator can be applied to numerous fields such as radar, satellites, aerospace, electronic communication, and so on.

摘要

针对当前衰减器存在的插入损耗高和衰减精度低的问题,本文提出了一种基于射频(RF)微机电系统(MEMS)开关的三通道可重构步进衰减器。共面波导(CPW)、十字形功率分配器、RF MEMS开关和π型衰减电阻网络被设计为衰减器的基本单元。该衰减器通过两个基本单元在125 GHz频率范围内以5 dB间隔实现了030 dB的衰减。结果表明,插入损耗小于1.41 dB,衰减精度优于2.48 dB,几何尺寸为2.4 mm×4.0 mm×0.7 mm。该衰减器可应用于雷达、卫星、航空航天、电子通信等众多领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/cdbc7f8ba820/micromachines-15-01182-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/411ede944287/micromachines-15-01182-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/a5204fd5d069/micromachines-15-01182-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/8ebfd98cca41/micromachines-15-01182-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/b56a8388fc93/micromachines-15-01182-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/b0819e2b050e/micromachines-15-01182-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/4ddb0ccd43a8/micromachines-15-01182-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/4ebe11b6e6e4/micromachines-15-01182-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/f9139ed82899/micromachines-15-01182-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/cdbc7f8ba820/micromachines-15-01182-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/411ede944287/micromachines-15-01182-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/a5204fd5d069/micromachines-15-01182-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/8ebfd98cca41/micromachines-15-01182-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/b56a8388fc93/micromachines-15-01182-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/b0819e2b050e/micromachines-15-01182-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/4ddb0ccd43a8/micromachines-15-01182-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/4ebe11b6e6e4/micromachines-15-01182-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/f9139ed82899/micromachines-15-01182-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bfb/11509362/cdbc7f8ba820/micromachines-15-01182-g009.jpg

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本文引用的文献

1
Comprehensive Review of RF MEMS Switches in Satellite Communications.卫星通信中射频微机电系统开关的综合综述
Sensors (Basel). 2024 May 15;24(10):3135. doi: 10.3390/s24103135.
2
Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage.具有高电容比和低驱动电压的Ka波段射频微机电系统开关的设计与制造
Micromachines (Basel). 2021 Dec 28;13(1):37. doi: 10.3390/mi13010037.
3
Analysis of the interchannel response in a MEMS 1 x N(2) wavelength-selective switch.
Appl Opt. 2007 Jun 1;46(16):3227-32. doi: 10.1364/ao.46.003227.