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微纹理的硬质颗粒掩膜电化学加工

Hard Particle Mask Electrochemical Machining of Micro-Textures.

作者信息

Qin Ge, Peng Haoyu, Zhang Yunyan, Ming Pingmei, Liu Huan, Wu Xiangyang, Zhang Wenbang, Zheng Xingshuai, Niu Shen

机构信息

School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454000, China.

出版信息

Materials (Basel). 2024 Oct 12;17(20):4986. doi: 10.3390/ma17204986.

DOI:10.3390/ma17204986
PMID:39459690
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509647/
Abstract

The efficient and cost-effective preparation of masks has always been a challenging issue in mask-based electrochemical machining. In this paper, an electrochemical machining process of micro-textures is proposed using hard particle masks such as titanium and zirconia particles. Numerical simulations were conducted to analyze the formation mechanisms of micro-protrusion structures with insulating and conductive hard particle masks, followed by experimental verification of the process. The results indicate that when the hard particles are electrically insulating, metal material preferentially dissolves at the center of the particle gap, and the dissolution then expands over time in depth and towards the particle contact points. Conversely, using the conductive particles as the masks, such as titanium particles, dissolution initially occurs in a ring region centered at the contact point between the hard particle and the anode, with a radius approximately one-quarter of the chosen particle's diameter (200 μm), and then continues to expand outward.

摘要

在基于掩膜的电化学加工中,高效且经济高效地制备掩膜一直是一个具有挑战性的问题。本文提出了一种使用钛和氧化锆颗粒等硬质颗粒掩膜进行微纹理电化学加工的工艺。进行了数值模拟,以分析使用绝缘和导电硬质颗粒掩膜时微凸起结构的形成机制,随后对该工艺进行了实验验证。结果表明,当硬质颗粒为电绝缘时,金属材料优先在颗粒间隙中心溶解,然后溶解随时间在深度上并朝着颗粒接触点扩展。相反,使用导电颗粒作为掩膜,如钛颗粒,溶解最初发生在以硬质颗粒与阳极之间的接触点为中心的环形区域,半径约为所选颗粒直径(200μm)的四分之一,然后继续向外扩展。

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本文引用的文献

1
Anodic Dissolution Characteristics of GH4169 Alloy in NaNO Solutions by Roll-Print Mask Electrochemical Machining Using the Linear Cathode.采用线性阴极的滚印掩膜电化学加工法研究GH4169合金在NaNO溶液中的阳极溶解特性。
Materials (Basel). 2024 Jun 4;17(11):2729. doi: 10.3390/ma17112729.
2
Through-Mask Electrochemical Micromachining with Reciprocating Foamed Cathode.
Micromachines (Basel). 2020 Feb 11;11(2):188. doi: 10.3390/mi11020188.
3
Maskless Hydrophilic Patterning of the Superhydrophobic Aluminum Surface by an Atmospheric Pressure Microplasma Jet for Water Adhesion Controlling.大气压微等离子体射流对超疏水铝表面无掩模亲水图案化及其对水接触角的控制。
ACS Appl Mater Interfaces. 2018 Feb 28;10(8):7497-7503. doi: 10.1021/acsami.7b19431. Epub 2018 Feb 19.
4
What do we need for a superhydrophobic surface? A review on the recent progress in the preparation of superhydrophobic surfaces.超疏水表面需要具备什么条件?超疏水表面制备的最新进展综述。
Chem Soc Rev. 2007 Aug;36(8):1350-68. doi: 10.1039/b602486f. Epub 2007 Jan 31.