Ultraflat hexagonal boron nitride for high-κ dielectric integration.
作者信息
Ko Hayoung, Lee Seungjin, Kim Ki Kang
机构信息
Department of Energy Science, Sungkyunkwan University, Suwon, Republic of Korea.
出版信息
Nat Mater. 2024 Nov;23(11):1461-1462. doi: 10.1038/s41563-024-02013-9.
PMID:39472750
Abstract
摘要
Zotero 插件