Navarathna Amy, Carey Benjamin J, Bennett James S, Khademi Soroush, Bowen Warwick P
Opt Express. 2024 Nov 4;32(23):41376-41389. doi: 10.1364/OE.538819.
Whispering Gallery Mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work, we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present experimentally observed optical quality factors of the order of 10 and a single-photon optomechanical coupling of approximately 15 kHz.
回音壁模式（WGM）光机械谐振器是一种很有前途的技术，可用于在纳米尺度上同时控制和测量光学和机械自由度。它们在诸如传感器和量子换能器等广泛应用中具有潜在用途。双盘WGM谐振器在其圆周周围具有强相互作用的机械和光学模式，并且这些模式共定位，由于其高光机械耦合，因而特别具有吸引力。此前尚未证明能大规模集成制造硅双盘WGM谐振器。在这项工作中，我们展示了一种制造双层绝缘体上硅晶圆的工艺，然后我们用该工艺制造具有片上光学耦合的功能性光机械双硅盘谐振器。这些集成器件在实验中观察到的光学品质因数约为10，单光子光机械耦合约为15 kHz。
