Yi Huang, Fan Bo, Bu Feng, Chen Fang, Luo Xiao-Qing
School of Electrical Engineering, University of South China, Hengyang 421001, China.
School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China.
Micromachines (Basel). 2024 Nov 15;15(11):1380. doi: 10.3390/mi15111380.
The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these gyroscopes are typically enclosed in high-vacuum packaging. This paper investigates a wafer-level high-vacuum-packaged (<0.1 Pa) cobweb-like disk resonator gyroscope, presenting a systematic and comprehensive theoretical analysis of the energy dissipation mechanisms, including air damping, thermoelastic damping, anchor loss, and other factors. Air damping is analyzed using both a continuous fluid model and an energy transfer model. The analysis results are validated through quality factor testing on batch samples and temperature characteristic testing on individual samples. The theoretical results obtained using the energy transfer model closely match the experimental measurements, with a maximum error in the temperature coefficient of less than 2%. The findings indicate that air damping and thermoelastic damping are the predominant energy dissipation mechanisms in the cobweb-like disk resonant gyroscope under high-vacuum conditions. Consequently, optimizing the resonator to minimize thermoelastic and air damping is crucial for designing high-performance gyroscopes.
微盘谐振器陀螺仪是一种具有用于导航级应用潜力的微机械装置，其性能受到品质因数的显著影响，品质因数由微谐振结构内的各种能量耗散机制决定。为了提高品质因数，这些陀螺仪通常采用高真空封装。本文研究了一种晶圆级高真空封装（<0.1 Pa）的蛛网状盘式谐振器陀螺仪，对包括空气阻尼、热弹性阻尼、锚点损耗等在内的能量耗散机制进行了系统全面的理论分析。使用连续流体模型和能量传递模型对空气阻尼进行了分析。通过对批量样品的品质因数测试和对单个样品的温度特性测试对分析结果进行了验证。使用能量传递模型获得的理论结果与实验测量结果紧密匹配，温度系数的最大误差小于2%。研究结果表明，在高真空条件下，空气阻尼和热弹性阻尼是蛛网状盘式谐振陀螺仪中的主要能量耗散机制。因此，优化谐振器以最小化热弹性和空气阻尼对于设计高性能陀螺仪至关重要。
