Xuan Jiawei, Zhu Ting, Peng Gao, Sun Fayou, Dong Dawei
School of Automation, Guangxi University of Science and Technology, Liuzhou 545006, China.
Sensors (Basel). 2024 Nov 6;24(22):7140. doi: 10.3390/s24227140.
In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the premise of low cost. This paper reviews the development of MEMS inertial measurement unit (IMU) array technology. First, the different types of common inertial measurement unit arrays are introduced and the basic principles are explained. Secondly, IMU array's development status is summarized by analyzing the research results over the years. Then, the key technologies and corresponding development status of IMU array are described, respectively, including error analysis modeling and calibration, data fusion technology, fault detection, and isolation technology. Finally, the characteristics and shortcomings of the past research results are summarized, the future research direction is discussed, and some thoughts are put forward to further improve the accuracy of the IMU array.
近年来，微机电系统（MEMS）技术发展迅速，低精度惯性器件已实现小体积、轻量化和量产。在此背景下，阵列技术应运而生，以在低成本前提下实现高精度惯性测量。本文综述了MEMS惯性测量单元（IMU）阵列技术的发展情况。首先，介绍了常见惯性测量单元阵列的不同类型并解释了其基本原理。其次，通过分析多年来的研究成果总结了IMU阵列的发展现状。然后，分别描述了IMU阵列的关键技术及相应发展状况，包括误差分析建模与校准、数据融合技术、故障检测与隔离技术。最后，总结了以往研究成果的特点与不足，探讨了未来研究方向，并提出了一些进一步提高IMU阵列精度的思路。
