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通过在旋转基板上沉积微晶形成籽晶层:有效线性弹性、压电和介电系数的建模

Seed layer formation by deposition of microcrystallites on a revolving substrate: modeling of the effective linear elastic, piezoelectric, and dielectric coefficients.

作者信息

Ballato Arthur, Ballato John

机构信息

Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USA.

Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.

出版信息

Acta Crystallogr B Struct Sci Cryst Eng Mater. 2024 Dec 1;80(Pt 6):760-5. doi: 10.1107/S2052520624010436.

Abstract

Averaging of material coefficients of crystallites deposited at an angle to a rotating substrate is considered. A simple model is proposed, and applied to determine effective linear dielectric, piezoelectric, and elastic constants of all Laue groups. While these represent tensors of rank 2, 3, and 4, the method applies generally to tensors of any rank. Results are then particularized for 6mm point symmetry crystals, and applied numerically to zinc oxide, ZnO. It is shown that, by means of the rotating substrate method, depositions may be achieved having the equivalent of hexagonal anisotropy, enabling the creation of `engineered' structures.

摘要

考虑对以一定角度沉积在旋转衬底上的微晶材料系数进行平均。提出了一个简单模型,并将其应用于确定所有劳厄群的有效线性介电常数、压电常数和弹性常数。虽然这些分别表示二阶、三阶和四阶张量,但该方法一般适用于任何阶数的张量。然后将结果针对6mm点对称晶体进行特殊化处理,并在数值上应用于氧化锌(ZnO)。结果表明,通过旋转衬底法,可以实现具有等效六方各向异性的沉积,从而能够制造出“工程化”结构。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/762a/11789169/542a09aae901/b-80-00760-fig1.jpg

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