Yang Fan, Li Rui-Hao, Tan Shi-Long, Dong Jian-Wen, Jiang Shao-Ji
School of Physics, State Key Laboratory of Optoelectronic Material and Technologies, Sun Yat-Sen University, Guangzhou 510275, P.R. China.
Nanophotonics. 2023 Mar 9;12(13):2451-2460. doi: 10.1515/nanoph-2023-0021. eCollection 2023 Jun.
Metamaterial absorbers over a broadband spectrum with high absorption, good angular tolerance, and easy configurations have essential importance for optical and optoelectronic devices. In this study, a hybrid metamaterial absorber comprising multilayered cermet thin films (multi-cermet) with tapered structure is designed and experimentally demonstrated. Combining optical interference of multi-cermet films and optical field localization of nano-cone structures, the average absorbance of both simulation and measurement are more than 98% in an ultrabroad bandwidth (300-3000 nm), and the proposed absorber shows a good angular tolerance as well. The composite process of two easy-operated and efficient methods, colloidal lithography, and magnetron sputtering, is employed for large-area fabrication. In addition, owing to flexible polyimide substrate, the proposed absorber also shows good bending and heating resistance, which reflects its potential in engineering application.
具有高吸收率、良好角度耐受性和易于配置的宽带超材料吸收器对光学和光电器件至关重要。在本研究中，设计并通过实验展示了一种包含具有锥形结构的多层金属陶瓷薄膜（多金属陶瓷）的混合超材料吸收器。结合多金属陶瓷薄膜的光学干涉和纳米锥结构的光场局域化，在超宽带（300 - 3000 nm）内，模拟和测量的平均吸收率均超过98%，且所提出的吸收器也表现出良好的角度耐受性。采用两种易于操作且高效的方法——胶体光刻和磁控溅射的复合工艺进行大面积制备。此外，由于采用了柔性聚酰亚胺衬底，所提出的吸收器还表现出良好的抗弯曲和耐热性，这反映了其在工程应用中的潜力。
