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用于无偏压硅基红外光电探测的纳米碗辅助宽带吸收器。

Nanobowls-assisted broadband absorber for unbiased Si-based infrared photodetection.

作者信息

Zhou Luwei, Zhang Cheng, Li Liujing, Liu Tingting, Li Ke, Wu Shaolong, Li Xiaofeng

出版信息

Opt Express. 2021 May 10;29(10):15505-15516. doi: 10.1364/OE.423897.

DOI:10.1364/OE.423897
PMID:33985249
Abstract

Hot electrons from the nonradiative decay of surface plasmons have drawn extensive attention due to the outstanding performance in realizing below-bandgap photodetection. However, the widely employed metallic nanostructures are normally complex and delicate with a great challenge in large-area fabrication, and there is a great limitation to achieve substantial photoresponse at relatively long wavelengths (e.g., 2000nm) with polarization- and incident-angle independence. In this study, we theoretically and experimentally demonstrate a broadband, omnidirectional, and polarization-insensitive absorber based on wafer-scale silicon honeycomb nanobowls with 20-nm-thick gold overlayer. The average absorption across the long wave near infrared band (LW-NIR, i.e., 1100-2500 nm) is higher than 82%, which is contributed from the random nature and multimode localized plasmonic resonances excited on the side walls of nanobowls. Benefitted from the well-connected thin Au film and relatively low Schottky barrier, the generated hot electrons have a high transport probability to reach Schottky interface and participate in the interfacial charge transfer process. As a result, the hot-electron photodetector under no bias realizes a broadband photodetection up to 2000nm wavelength with a responsivity of 0.145 mA/W, and its cutoff wavelength is predicted up to 3300 nm by fitting the experimental result with Fowler theory. Our proposed Au/Si nanobowls photodetector could open a pathway to further extend the detection wavelength of Si-based photodetectors with a large-area and low-cost fabrication process, which promotes practical hot-electron applications.

摘要

表面等离激元的非辐射衰变产生的热电子,因其在实现带隙以下光探测方面的出色表现而备受关注。然而,广泛使用的金属纳米结构通常复杂且精细,大面积制造面临巨大挑战,并且在实现相对长波长(例如2000nm)下具有偏振和入射角无关的显著光响应方面存在很大限制。在本研究中,我们通过理论和实验证明了一种基于具有20nm厚金覆盖层的晶圆级硅蜂窝纳米碗的宽带、全向和偏振不敏感吸收器。在长波近红外波段(LW-NIR,即1100 - 2500 nm)的平均吸收率高于82%,这源于纳米碗侧壁上激发的随机性质和多模局域等离激元共振。受益于连接良好的薄金膜和相对较低的肖特基势垒,产生的热电子具有很高的传输概率到达肖特基界面并参与界面电荷转移过程。结果,无偏压下的热电子光电探测器实现了高达2000nm波长的宽带光探测,响应率为0.145 mA/W,通过将实验结果与福勒理论拟合,预测其截止波长高达3300 nm。我们提出的金/硅纳米碗光电探测器可以开辟一条途径,通过大面积和低成本制造工艺进一步扩展硅基光电探测器的探测波长,这促进了热电子的实际应用。

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