可调谐TiZrMoC涂层：微观结构、力学性能和耐磨性的综合研究

Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance.

作者信息

Pogrebnjak Alexander, Buranych Volodymyr, Ivashchenko Volodymyr, Borba-Pogrebnjak Svitlana, Maksakova Olga, Caplovicová Maria, Goncharov Alexander, Onoprienko Alexei, Skrynskyy Petro, Sahul Martin, Konarski Piotr, Budzynski Piotr, Kaminski Mariusz, Opielak Marek, Flock Dominik, Pelenovich Vasiliy, Bing Yang

机构信息

Biomedical Research Centre, Sumy State University, 116, Kharkivska St., 40007 Sumy, Ukraine.

Institute of Materials Science, Faculty of Materials Science and Technology, Slovak University of Technology, J. Bottu 25, 917 24 Trnava, Slovakia.

出版信息

Nanomaterials (Basel). 2024 Dec 11;14(24):1986. doi: 10.3390/nano14241986.

DOI:10.3390/nano14241986

PMID:39728522

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11728635/

Abstract

TiZrMoC coatings were deposited on Si(100) substrates using a DC dual magnetron sputtering. The composition was controlled by adjusting the sputtering parameters of the TiZrMo and graphite targets. The influence of graphite target current on the resulting coating properties was explored. TEM analysis revealed a single-phase structure with Ti/Mo/Zr substitutional elements, columnar grains, and a strong [111] texture. Nanotwins and stacking faults were prevalent within the nanocrystals. EDX, SIMS, XRD, and XPS analyses confirmed the elemental composition and nanostructure. Computational modeling was employed to investigate the mixing behavior of the quaternary solid solutions depending on the valency electron concentration. The films exhibited exceptional mechanical properties, including a maximum hardness of 35 GPa and a wear rate of 2.11 × 10 mmNm, attributed to the presence of an amorphous carbon layer and optimized deposition parameters. These findings demonstrate the potential of TiZrMoC coatings for advanced applications requiring exceptional wear resistance and durability.

摘要

采用直流双磁控溅射法在Si(100)衬底上沉积TiZrMoC涂层。通过调整TiZrMo靶和石墨靶的溅射参数来控制成分。研究了石墨靶电流对所得涂层性能的影响。透射电子显微镜（TEM）分析表明，涂层具有单相结构，含有Ti/Mo/Zr替代元素、柱状晶粒以及强烈的[111]织构。纳米孪晶和堆垛层错在纳米晶体中普遍存在。能量色散X射线光谱（EDX）、二次离子质谱（SIMS）、X射线衍射（XRD）和X射线光电子能谱（XPS）分析证实了元素组成和纳米结构。采用计算模型研究了四元固溶体的混合行为与价电子浓度的关系。由于存在非晶碳层和优化的沉积参数，该薄膜表现出优异的力学性能，包括最大硬度为35 GPa，磨损率为2.11×10 mmNm。这些发现证明了TiZrMoC涂层在需要优异耐磨性和耐久性的先进应用中的潜力。