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用于在线卷对卷图案化薄膜热电材料的含铜或含银的铋锑碲材料。

Cu- or Ag-containing Bi-Sb-Te for in-line roll-to-roll patterned thin-film thermoelectrics.

作者信息

Tao Xudong, Zheng Qianfang, Zeng Chongyang, Potter Harry, Zhang Zheng, Ellingford Joshua, Bonilla Ruy S, Bilotti Emiliano, Grant Patrick S, Assender Hazel E

机构信息

Department of Materials, University of Oxford, Parks Road, Oxford, UK.

Department of Aeronautics, Imperial College London, Exhibition Road, London, UK.

出版信息

Nat Commun. 2025 Jan 3;16(1):196. doi: 10.1038/s41467-024-55279-7.

Abstract

The Selective Metallization Technique shows promise for roll-to-roll in-line patterning of flexible electronics using evaporated metals, but challenges arise when applied to sputtering functional materials. This study overcomes these challenges with simultaneous sputtering of Bi-Sb-Te and evaporation of metal (Ag or Cu) for thermoelectric layers when using Selective Metallization Technique. Large-scale manufacturing is demonstrated through roll-to-roll processing of a 0.8 m wide polymer web at 25 m/min, achieving high-throughput production of functional thin-film patterns with nanometer thickness. The room-temperature-deposited material system exhibits significantly enhanced thermoelectric performance and facilitates an n-type-to-p-type transition in the Cu- or Ag-containing Bi-Sb-Te-based composite film. Here, we show that while applying Selective Metallization Technique, the evaporation of metal modifies the impact of residual oil on Bi-Sb-Te, which can be effectively removed with a few seconds of plasma exposure, and the fabricated thermoelectric devices are validated in wearable applications utilizing a coiled-up wristband design.

摘要

选择性金属化技术在使用蒸发金属对柔性电子产品进行卷对卷在线图案化方面显示出前景,但在应用于溅射功能材料时会出现挑战。本研究通过在使用选择性金属化技术时同时溅射Bi-Sb-Te和蒸发金属(Ag或Cu)来制备热电层,克服了这些挑战。通过在25米/分钟的速度下对0.8米宽的聚合物幅材进行卷对卷加工,展示了大规模制造,实现了具有纳米厚度的功能性薄膜图案的高通量生产。室温沉积的材料系统表现出显著增强的热电性能,并促进了含Cu或Ag的Bi-Sb-Te基复合薄膜从n型到p型的转变。在此,我们表明,在应用选择性金属化技术时,金属的蒸发改变了残留油对Bi-Sb-Te的影响,通过几秒钟的等离子体暴露可以有效去除残留油,并且所制造的热电器件在采用卷曲腕带设计的可穿戴应用中得到了验证。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c892/11698979/0366eb7338ab/41467_2024_55279_Fig1_HTML.jpg

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