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三指微夹钳和板中毛细力与毛细上升的研究:数值模拟与实验验证

Investigations into Capillary Forces and Capillary Rise in a Three-Finger Microgripper and a Plate: Numerical Simulations and Experimental Validation.

作者信息

Xu Zhi, Fan Zenghua, Gao Jun, Zhang Kun, Zhang Xiang

机构信息

School of Mechanical Engineering, Shandong University of Technology, Zibo 255049, China.

出版信息

Micromachines (Basel). 2024 Nov 29;15(12):1459. doi: 10.3390/mi15121459.

Abstract

The assembly and position adjustment of micro-components have wide applications in micro-electromechanical systems, wafer packaging and biomedicine. However, current single-finger microgrippers only allow for the pickup and release of micro-components. In the present study, a three-finger capillary microgripper was developed to pick up, release and adjust the position of micro-components. The capillary force and the capillary rise generated by the capillary bridge were investigated by simulation and experiments. A simulation model was set up by the minimum energy method. On the established experimental platform, capillary forces were measured at different separation distances. When the volume was 0.9 μL, the maximum capillary forces gained from the capillary bridge model and experiments were 95.2 μN and 96.0 μN, respectively. A comparison of the capillary bridge models and the experimental results of the capillary forces demonstrate the reliability of the capillary bridge models. The influences of various parameters were investigated in detail by the capillary bridge model. The results demonstrate that when the side of the probe is hydrophilic, the variations in the capillary force with various factors such as separation distance and capillary bridge volume is non-monotonic, which is caused by the restriction of the probe edge.

摘要

微部件的组装和位置调整在微机电系统、晶圆封装和生物医学等领域有着广泛的应用。然而,目前的单指微夹钳仅能实现微部件的拾取和释放。在本研究中,开发了一种三指毛细管微夹钳,用于拾取、释放和调整微部件的位置。通过模拟和实验研究了毛细管力以及由毛细管桥产生的毛细上升现象。采用最小能量法建立了模拟模型。在搭建的实验平台上,测量了不同分离距离下的毛细管力。当体积为0.9 μL时,毛细管桥模型和实验得到的最大毛细管力分别为95.2 μN和96.0 μN。毛细管桥模型与毛细管力实验结果的比较证明了毛细管桥模型的可靠性。利用毛细管桥模型详细研究了各种参数的影响。结果表明,当探针侧面为亲水性时,毛细管力随分离距离和毛细管桥体积等各种因素的变化是非单调的,这是由探针边缘的限制所致。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/175d/11677942/55cb4c93428b/micromachines-15-01459-g001.jpg

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