Schiester Maximilian, Waldl Helene, Rice Katherine P, Hans Marcus, Primetzhofer Daniel, Schalk Nina, Tkadletz Michael
Christian Doppler Laboratory for Sustainable Hard Coatings at the Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria; Christian Doppler Laboratory for Advanced Coated Cutting Tools at the Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria.
Christian Doppler Laboratory for Advanced Coated Cutting Tools at the Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria.
Ultramicroscopy. 2025 Apr;270:114105. doi: 10.1016/j.ultramic.2025.114105. Epub 2025 Jan 17.
The impact of the laser wavelength on accuracy in elemental composition analysis in atom probe tomography (APT) was investigated. Three different commercial atom probe systems - LEAP 3000X HR, LEAP 5000 XR, and LEAP 6000 XR - were systematically compared for a TiN model coating studying the effect of shorter laser wavelengths, especially in the deep ultraviolet (DUV) range, on the evaporation behavior. The findings demonstrate that the use of shorter wavelengths enhances the accuracy in elemental composition, while maintaining similar electric field strengths. Thus, thermal effects are reduced, which in turn improves mass resolving power. An important aspect of this research includes the estimation of energy density ratios of the different instruments. The reduction in wavelength is accompanied by increasing energy densities due to smaller laser spot sizes. Furthermore, advancements in the detector technology were studied. Finally, the detector dead-times were determined and dead-zones were evaluated to investigate the ion pile-up behavior in APT measurements of nitrides with the LEAP 6000 XR.
研究了激光波长对原子探针断层扫描（APT）中元素成分分析准确性的影响。针对TiN模型涂层，系统比较了三种不同的商用原子探针系统——LEAP 3000X HR、LEAP 5000 XR和LEAP 6000 XR，研究了较短激光波长，特别是深紫外（DUV）范围内的波长对蒸发行为的影响。研究结果表明，在保持相似电场强度的同时，使用较短波长可提高元素成分分析的准确性。因此，热效应降低，进而提高了质量分辨能力。这项研究的一个重要方面包括对不同仪器能量密度比的估计。由于激光光斑尺寸减小，波长减小伴随着能量密度增加。此外，还研究了探测器技术的进展。最后，确定了探测器死时间并评估了死区，以研究使用LEAP 6000 XR进行氮化物APT测量时的离子堆积行为。
