Stable Field Emissions from Zirconium Carbide Nanoneedle Electron Source.

In this study, a single zirconium carbide (ZrC) nanoneedle structure oriented in the <100> direction was fabricated by a dual-beam focused ion beam (FIB-SEM) system, and its field emission characteristics and emission current stability were evaluated. Benefiting from controlled fabrication with real-time observation, the ZrC nanoneedle has a smooth surface and a tip with a radius of curvature smaller than 20 nm and a length greater than 2 μm. Due to its low work function and well-controlled morphology, the ZrC nanoneedle emitter, positioned in a high-vacuum chamber, was able to generate a single and collimated electron beam with a current of 1.2 nA at a turn-on voltage of 210 V, and the current increased to 100 nA when the applied voltage reached 325 V. After the treatment of the nanoneedle tip, the field emission exhibited a stable emission for 150 min with a fluctuation of 1.4% and an emission current density as high as 1.4 × 10 A m. This work presents an efficient and controllable method for fabricating nanostructures, and this method is applicable to the transition metal compound ZrC as a field emission emitter, demonstrating its potential as an electron source for electron-beam devices.