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基于相干扫描干涉术物理像差恢复的条纹纹理驱动液滴测量端到端网络

Fringe Texture Driven Droplet Measurement End-to-End Network Based on Physics Aberrations Restoration of Coherence Scanning Interferometry.

作者信息

Zhang Zhou, Chen Jiankui, Yang Hua, Yin Zhouping

机构信息

State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

出版信息

Micromachines (Basel). 2024 Dec 30;16(1):42. doi: 10.3390/mi16010042.

Abstract

Accurate and efficient measurement of deposited droplets' volume is vital to achieve zero-defect manufacturing in inkjet printed organic light-emitting diode (OLED), but it remains a challenge due to droplets' featurelessness. In our work, coherence scanning interferometry (CSI) is utilized to measure the volume. However, the CSI redundant sampling and image degradation led by the sample's transparency decrease the efficiency and accuracy. Based on the prior degradation and strong representation for context, a novel method, volume measurement via fringe distribution module (VMFD), is proposed to directly measure the volume by single interferogram without redundant sampling. Firstly, the 3D point spread function (PSF) for CSI imaging is modeling to relate the degradation and image. Secondly, the Zernike to PSF (ZTP) module is proposed to efficiently compute the aberrations to PSF. Then, a physics aberration restoration network (PARN) is designed to remove the degradation via the channel Transformer and U-net architecture. The long term context is learned by PARN and beneficial to restoration. The restored fringes are used to measure the droplet's volume by constrained regression network (CRN) module. Finally, the performances on public datasets and the volume measurement experiments show the promising deblurring, measurement precision and efficiency.

摘要

准确而高效地测量沉积液滴的体积对于实现喷墨打印有机发光二极管(OLED)的零缺陷制造至关重要,但由于液滴缺乏特征,这仍然是一个挑战。在我们的工作中,采用了相干扫描干涉测量法(CSI)来测量体积。然而,CSI的冗余采样以及由样品透明度导致的图像退化降低了效率和准确性。基于先前的退化情况以及对上下文的强表示能力,提出了一种新方法——通过条纹分布模块进行体积测量(VMFD),以通过单个干涉图直接测量体积,而无需进行冗余采样。首先,对CSI成像的三维点扩散函数(PSF)进行建模,以关联退化情况和图像。其次,提出了从泽尼克系数到PSF(ZTP)模块,以有效地计算PSF的像差。然后,设计了一个物理像差恢复网络(PARN),通过通道变换器和U-net架构来消除退化。PARN学习长期上下文信息并有助于恢复。通过约束回归网络(CRN)模块,利用恢复后的条纹来测量液滴的体积。最后,在公共数据集上的性能以及体积测量实验表明,该方法在去模糊、测量精度和效率方面具有良好的前景。

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