Zhu Yahui, Tian Ailing, Liu Bingcai, Wang Hongjun
J Opt Soc Am A Opt Image Sci Vis. 2024 Nov 1;41(11):C10-C21. doi: 10.1364/JOSAA.526118.
Quadriwave lateral shearing interferometry (QWLSI) is based on double birefringent crystals of a beam displacer (DBCs-BD), which can generate the lateral shearing interference wavefront of four beams of overlapped replicas in the DBCs-BD orthogonal directions. When the replica waves are overlapped incident to the analyzer and the direction of the transmission axis is set as 45° or 135°, the QWLSI's polarization interferogram can be obtained. This paper deduces the principle of QWLSI based on the DBCs-BD and presents the analysis of orthogonal error influence based on the DBCs-BD and the phase retrieval error of QWLSI when shear displacement by tilted incident on the DBCs-BD. In our investigation, we have established the correction range of the PBD's orthogonal angle error is within -0.5-0.5, the maximum error in PV is 0.0012, and the maximum error in RMS is 1.3789×10 in wavefront reconstruction. Moreover, when the testing light tilts to incident on the PBD in the range of -0.4-0.4, correction of the shear distance is used for wavefront reconstruction to achieve a high-precision wavefront testing result. Finally, the experiment shows that QWLSI based on the DBCs-BD exhibits feasibility and high precision.
四波横向剪切干涉术（QWLSI）基于光束位移器的双折射晶体（DBCs-BD），其能够在DBCs-BD的正交方向上产生四束重叠复制品的横向剪切干涉波前。当复制品波重叠入射到检偏器且将透射轴方向设置为45°或135°时，可获得QWLSI的偏振干涉图。本文推导了基于DBCs-BD的QWLSI原理，并给出了基于DBCs-BD的正交误差影响分析以及当倾斜入射到DBCs-BD上产生剪切位移时QWLSI的相位恢复误差分析。在我们的研究中，已确定在波前重建中PBD的正交角误差校正范围在-0.5至0.5内，PV的最大误差为0.0012，RMS的最大误差为1.3789×10 。此外，当测试光在-0.4至0.4范围内倾斜入射到PBD上时，采用剪切距离校正进行波前重建以获得高精度的波前测试结果。最后，实验表明基于DBCs-BD的QWLSI具有可行性和高精度。
