Wu Jianpeng, Meng Xiangjun, Li Xingang, Yang Xiankui, Li Xin, Wang Yafeng, He Lin
School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China.
Peric Special Gases Co., Ltd., Handan 056002, Hebei, China.
ACS Omega. 2025 Jan 20;10(4):3304-3321. doi: 10.1021/acsomega.4c11068. eCollection 2025 Feb 4.
Disilane is a gaseous source of silicon widely used in solar photovoltaics and integrated circuit industries. In recent years, the development of efficient disilane synthesis processes has become increasingly urgent with the rapid development and growing demands of related industries. This review provides a comprehensive overview of different disilane synthesis methods and investigates silane decomposition mechanisms in the synthesis of higher-order silanes. The reaction kinetics of disilane and silane are also summarized to provide insights into the physical and chemical mechanisms for the synthesis of disilane from silane. Finally, the present challenges for the realization of industrial disilane synthesis from silane are discussed. This review would provide insights for the development of green, safe, and efficient disilane synthesis processes.
乙硅烷是一种广泛应用于太阳能光伏和集成电路行业的硅气态源。近年来,随着相关行业的快速发展和需求的不断增长,高效乙硅烷合成工艺的开发变得日益迫切。本文综述了不同的乙硅烷合成方法,并研究了高阶硅烷合成过程中的硅烷分解机理。还总结了乙硅烷和硅烷的反应动力学,以深入了解由硅烷合成乙硅烷的物理和化学机理。最后,讨论了从硅烷实现工业乙硅烷合成目前面临的挑战。本文综述将为绿色、安全和高效的乙硅烷合成工艺的发展提供见解。