Wang Shao-Min, Zhang Qian, Li Yi-Tao, Liu Si-Chao, Yang Qing-Yuan
School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an 710049, China.
High & New Technology Research Center of Henan Academy of Sciences, Zhengzhou 450052, Henan Province, China.
Chem Bio Eng. 2024 Feb 16;1(6):535-540. doi: 10.1021/cbe.3c00096. eCollection 2024 Jul 25.
Using solid adsorbents for the destructive sorption of nitrogen trifluoride (NF) presents a potential solution to its dual challenges as a potent greenhouse gas and hazardous compound in microelectronics. In this study, a series of MOFs (M-MOF-74, M = Mg, Co, Ni, Zn) with open metal sites (OMSs) are utilized for NF adsorption. By employing single-component adsorption isotherms and the ideal adsorbed solution theory (IAST) selectivity calculations, the adsorption performance of various adsorbents is evaluated. The results indicate that Mg, Co, and Ni-MOF-74 exhibit high adsorption capacities for NF, while Zn-MOF-74 shows a lower adsorption capacity, likely due to the weaker Lewis acidity of Zn. Experimental findings from PXRD and gas adsorption studies indicate structural pore alteration in the MOF-74 series following NF gas adsorption. Theoretical computational analyses reveal that the MOF-74 series has a higher adsorption affinity for NF compared to N. This research provides insights into the use of efficient MOF sorbents for the destructive adsorption of NF.
使用固体吸附剂对三氟化氮（NF₃）进行破坏性吸附，为解决其作为强效温室气体和微电子领域有害化合物所带来的双重挑战提供了一种潜在方案。在本研究中，一系列具有开放金属位点（OMS）的金属有机框架材料（MOF，M-MOF-74，M = Mg、Co、Ni、Zn）被用于NF₃吸附。通过采用单组分吸附等温线和理想吸附溶液理论（IAST）选择性计算，评估了各种吸附剂的吸附性能。结果表明，Mg-MOF-74、Co-MOF-74和Ni-MOF-74对NF₃表现出高吸附容量，而Zn-MOF-74的吸附容量较低，这可能是由于Zn的路易斯酸性较弱。粉末X射线衍射（PXRD）和气体吸附研究的实验结果表明，NF₃气体吸附后MOF-74系列的结构孔隙发生了改变。理论计算分析表明，与N₂相比，MOF-74系列对NF₃具有更高的吸附亲和力。本研究为使用高效MOF吸附剂对NF₃进行破坏性吸附提供了见解。
