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用于测量场发射电流的CMOS图像传感器测量信号的影响因素研究。

Investigation of Influencing Factors on the Measurement Signal of a CMOS Image Sensor for Measuring Field Emission Currents.

作者信息

Hausladen Matthias, Schels Andreas, Asgharzade Ali, Buchner Philipp, Bartl Mathias, Wohlfartsstätter Dominik, Edler Simon, Bachmann Michael, Schreiner Rupert

机构信息

Faculty of Applied Natural and Cultural Sciences, Ostbayerische Technische Hochschule Regensburg, 93053 Regensburg, Germany.

Ketek GmbH, 81737 Munich, Germany.

出版信息

Sensors (Basel). 2025 Feb 28;25(5):1529. doi: 10.3390/s25051529.

Abstract

We use optical CMOS image sensors for spatially and time-resolved measurement of the emission currents of field emission cathodes. The measured signal depends, on the one hand, on the emission current that flows from the cathode surface through the vacuum to the sensor surface. On the other hand, it is influenced by other variables, such as the extraction voltage, which accelerates the electrons towards the sensor surface, and the exposure time set on the sensor. In this article, these influencing factors on the measured pixel signals of a CMOS image sensor are examined in detail. In the first step, an equation is formulated that describes the signal measured by the sensor as a function of the emission current from a field emission tip, with the acceleration voltage and the exposure time as parameters. In the next step, we explain how the sensor signal is determined from the captured images. We then conduct experiments with a segmented field emission array consisting of 2 × 2 individually addressable emitters, where the voltage and currents for each emitter are known. The sensor signals are then measured for various voltages and currents and compared with the theoretical predictions. Thus, we demonstrate that, for a known voltage, the sensor signals obtained from the images can be corrected using the theoretical correlation, allowing the sensor signal to be used to measure the emitter current. This method can also be applied to investigate field emission arrays with many tips, provided that the emission spots on the CMOS sensor images can be clearly distinguished.

摘要

我们使用光学CMOS图像传感器对场发射阴极的发射电流进行空间和时间分辨测量。一方面,测量信号取决于从阴极表面通过真空流向传感器表面的发射电流。另一方面,它受到其他变量的影响,例如将电子加速向传感器表面的提取电压以及传感器上设置的曝光时间。在本文中,将详细研究这些对CMOS图像传感器测量像素信号的影响因素。第一步,建立一个方程,该方程将传感器测量的信号描述为场发射尖端发射电流的函数,并将加速电压和曝光时间作为参数。下一步,我们解释如何从捕获的图像中确定传感器信号。然后,我们使用由2×2个可单独寻址的发射器组成的分段场发射阵列进行实验,其中每个发射器的电压和电流是已知的。接着测量各种电压和电流下的传感器信号,并与理论预测值进行比较。因此,我们证明,对于已知电压,可以使用理论相关性对从图像中获得的传感器信号进行校正,从而使传感器信号可用于测量发射器电流。只要CMOS传感器图像上的发射点能够清晰区分,该方法也可应用于研究具有多个尖端的场发射阵列。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/28ec/11902508/c27d170da342/sensors-25-01529-g001.jpg

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