Frydendahl Christian, Yezekyan Torgom, Zenin Vladimir A, Bozhevolnyi Sergey I
Centre for Nano Optics, University of Southern Denmark, Campusvej 55, DK-5230 Odense, Denmark.
Department of Physics and Astronomy, Aarhus University, Ny Munkegade 120, DK-8000 Aarhus, Denmark.
Nano Lett. 2025 Apr 23;25(16):6414-6420. doi: 10.1021/acs.nanolett.4c06398. Epub 2025 Mar 26.
Incorporating on-chip light sources directly into nanophotonic waveguides generally requires introducing a different material to the chip than that used for guiding the light, a crucial step that requires dealing with several technical challenges, e.g., atomic lattice mismatch in epitaxial growth between substrate and luminescent materials, resulting in strain defects that lower performance. Here we demonstrate that van der Waals materials, such as the 2D semiconductor MoSe, can easily be transferred onto gold plasmonic nanowaveguides using standard dry viscoelastic polymer transfer techniques. We further show that the photoluminescence from MoSe can be injected directly into the on-chip waveguides. Our fabrication methods are compatible with large-scale roll-to-roll manufacturing techniques, highlighting a potential cost-effective and scalable hybrid plasmonic and 2D semiconductor platform for integrated nanophotonics.
将片上光源直接集成到纳米光子波导中通常需要在芯片中引入一种不同于用于导光的材料，这一关键步骤需要应对若干技术挑战，例如衬底与发光材料外延生长过程中的原子晶格失配，从而导致应变缺陷，降低性能。在此，我们证明，诸如二维半导体二硒化钼（MoSe₂）之类的范德华材料可以使用标准的干式粘弹性聚合物转移技术轻松转移到金等离子体纳米波导上。我们进一步表明，二硒化钼的光致发光可以直接注入到片上波导中。我们的制造方法与大规模卷对卷制造技术兼容，这突出了一种用于集成纳米光子学的具有潜在成本效益且可扩展的混合等离子体和二维半导体平台。
