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同步增强用于先进微电子封装的取向石墨复合材料的平面内热导率和近场电磁干扰屏蔽效能

Synchronously Enhancing Through-Plane Thermal Conductivity and Near-Field Electromagnetic Interference Shielding Effectiveness of Aligned-Graphite Composites for Advanced Microelectronic Packaging.

作者信息

Zhang Shengqiang, Wang Yong, Deng Fukang, Tian Dingkun, Xu Yadong, Zhao Tao, Sun Rong, Hu Yougen

机构信息

Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China.

School of Nano Science and Technology, University of Science and Technology of China, Suzhou, 215000, China.

出版信息

Small. 2025 Jun;21(23):e2500973. doi: 10.1002/smll.202500973. Epub 2025 Apr 13.

Abstract

The application of composites that integrate functions of thermally conductive and electromagnetic interference (EMI) shielding in advanced microelectronic packaging has provided an effective solution to the heat dissipation and electromagnetic compatibility issues of electronic devices. Graphite flakes, with their outstanding electrical and thermal conductivities, are widely regarded as ideal candidates for creating composites that achieve both thermal conductivity and EMI shielding. However, the anisotropic properties of graphite lead to significant differences in electrical and thermal conductivity in different directions, which may limit their applications. To overcome this issue, the vertically aligned graphite (VG), nickel-coated graphite (Ni@G), and silicone gel (SG) composites (VG-Ni@G-SG) have been successfully fabricated via shear-induced alignment and ultrasonic cutting technology. The VG-Ni@G-SG composites synchronously achieve high through-plane thermal conductivity of 15.8 W m K and near-field shielding effectiveness (NF-SE) of -68 dB in the frequency range of 500 MHz-7 GHz, and also exhibit a low compression modulus of 0.6 MPa, which is essential for reducing packaging thickness and improving electromagnetic sealing and heat dissipation of electronics. The VG-Ni@G-SG composites demonstrate promising prospects for the miniaturization and high performance of modern electronic devices.

摘要

将具有导热和电磁干扰(EMI)屏蔽功能的复合材料应用于先进的微电子封装中,为解决电子设备的散热和电磁兼容性问题提供了有效的解决方案。石墨片具有出色的电导率和热导率,被广泛认为是制备兼具热导率和EMI屏蔽性能复合材料的理想候选材料。然而,石墨的各向异性导致其在不同方向上的电导率和热导率存在显著差异,这可能会限制其应用。为克服这一问题,通过剪切诱导取向和超声切割技术成功制备了垂直排列石墨(VG)、镀镍石墨(Ni@G)和硅胶(SG)复合材料(VG-Ni@G-SG)。VG-Ni@G-SG复合材料在500 MHz至7 GHz频率范围内同步实现了15.8 W m⁻¹ K⁻¹的高面内热导率和-68 dB的近场屏蔽效能(NF-SE),并且还表现出0.6 MPa的低压缩模量,这对于减小封装厚度以及改善电子产品的电磁密封和散热至关重要。VG-Ni@G-SG复合材料在现代电子设备的小型化和高性能方面展现出了广阔的前景。

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