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基于亚波长超材料的偏振无关硅微天线。

Polarization independent silicon micro antenna based on a subwavelength metamaterial.

作者信息

Salhi Sarra, Xin Xiaochen, Benedikovič Daniel, Alonso-Ramos Carlos, Vivien Laurent, Marris-Morini Delphine, Cassan Eric, Ye Winnie N, Melati Daniele

机构信息

Centre de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120, Palaiseau, France.

Department of Electronics, Carleton University, Ottawa, ON, K1S 5B6, Canada.

出版信息

Sci Rep. 2025 Apr 17;15(1):13276. doi: 10.1038/s41598-025-97833-3.

DOI:10.1038/s41598-025-97833-3
PMID:40246929
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12006522/
Abstract

Optical antennas are key components of an optical phased array system, enabling light coupling between the chip and the free space. In such systems, surface gratings are commonly used as antenna elements, which however suffer from a strong polarization sensitivity of their scattering angle and efficiency. Here, we propose a versatile approach to realize micro antennas based on surface gratings with a polarization insensitive behavior exploiting a subwavelength metamaterial in the silicon-on-insulator platform. In the experimental demonstration, the antenna successfully achieves the same diffraction angle of 10° for both TE and TM polarizations and an estimated scattering efficiency of -4 dB despite a very compact footprint of 6.4 [Formula: see text] x 2.9 [Formula: see text]. The difference in diffraction efficiency between the two polarizations remains smaller than 1 dB over a bandwidth of 31 nm.

摘要

光学天线是光学相控阵系统的关键组件，可实现芯片与自由空间之间的光耦合。在这类系统中，表面光栅通常用作天线元件，然而其散射角和效率存在很强的偏振敏感性。在此，我们提出一种通用方法，基于绝缘体上硅平台中的亚波长超材料，实现具有偏振不敏感特性的基于表面光栅的微天线。在实验演示中，尽管天线的占地面积非常小，仅为6.4 [公式：见原文]×2.9 [公式：见原文]，但对于TE和TM偏振，天线均成功实现了10°的相同衍射角，估计散射效率为 -4 dB。在31 nm的带宽内，两种偏振之间的衍射效率差异保持小于1 dB。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/1b07962192f5/41598_2025_97833_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/5dd3ad67638e/41598_2025_97833_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/8de6ba920b49/41598_2025_97833_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/714149171a61/41598_2025_97833_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/97ffbaad60b1/41598_2025_97833_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/f3a82e82d5a3/41598_2025_97833_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/14743836ec50/41598_2025_97833_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/48d36fdcde4c/41598_2025_97833_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/1b07962192f5/41598_2025_97833_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/5dd3ad67638e/41598_2025_97833_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/8de6ba920b49/41598_2025_97833_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/714149171a61/41598_2025_97833_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/97ffbaad60b1/41598_2025_97833_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/f3a82e82d5a3/41598_2025_97833_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/14743836ec50/41598_2025_97833_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/48d36fdcde4c/41598_2025_97833_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/19d9/12006522/1b07962192f5/41598_2025_97833_Fig8_HTML.jpg

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本文引用的文献

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Polarization-insensitive 1D unidirectional compact grating coupler for the C-band using a 500  nm SOI.采用500纳米硅基绝缘体上硅技术的用于C波段的偏振不敏感一维单向紧凑型光栅耦合器。
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Circular Optical Phased Arrays with Radial Nano-Antennas.带有径向纳米天线的圆形光学相控阵
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