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通过气源分子束外延生长的高质量GaP(111)用于光子晶体和先进非线性光学应用。

High-Quality GaP(111) Grown by Gas-Source MBE for Photonic Crystals and Advanced Nonlinear Optical Applications.

作者信息

Hestroffer Karine, Rivoire Kelley, Vučković Jelena, Hatami Fariba

机构信息

Department of Physics, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany.

E. L. Ginzton Laboratory, Stanford University, Stanford, CA 94305, USA.

出版信息

Nanomaterials (Basel). 2025 Apr 18;15(8):619. doi: 10.3390/nano15080619.

Abstract

The precise fabrication of semiconductor-based photonic crystals with tailored optical properties is critical for advancing photonic devices. GaP(111) is a material of particular interest due to its high refractive index, wide optical bandgap, and pronounced optical anisotropy, offering unique opportunities for photonic applications. Its near-lattice matching with silicon substrates further facilitates integration with existing silicon-based technologies. In this study, we present the growth of high-quality GaP(111) thin films using gas-source molecular-beam epitaxy (GSMBE), achieving atomically smooth terraces for the homo-epitaxy of GaP(111). We demonstrate the fabrication of photonic crystal cavities from GaP(111), employing AlGaP(111) as a sacrificial layer, and achieve a quality factor of 1200 for the cavity mode with resonance around 1500 nm. This work highlights the potential of GaP(111) for advanced photonic architectures, particularly in applications requiring strong light confinement and nonlinear optical processes, such as second-harmonic and sum-frequency generation.

摘要

精确制造具有定制光学特性的半导体基光子晶体对于推进光子器件至关重要。GaP(111)因其高折射率、宽光学带隙和明显的光学各向异性而备受关注,为光子应用提供了独特的机会。它与硅衬底的近晶格匹配进一步促进了与现有硅基技术的集成。在本研究中,我们展示了使用气体源分子束外延(GSMBE)生长高质量的GaP(111)薄膜,实现了用于GaP(111)同质外延的原子级光滑台面。我们展示了以AlGaP(111)作为牺牲层从GaP(111)制造光子晶体腔,并在共振波长约为1500 nm时实现了腔模品质因数为1200。这项工作突出了GaP(111)在先进光子架构中的潜力,特别是在需要强光限制和非线性光学过程(如二次谐波和和频产生)的应用中。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8c75/12029167/172e6fd7007d/nanomaterials-15-00619-g001.jpg

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