Qin Jiaxin, Xia Wenliang, Wang Junbo, Chen Deyong, Lu Yulan, Huo Xiaoye, Xie Bo, Chen Jian
Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100094, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
Microsyst Nanoeng. 2025 May 21;11(1):98. doi: 10.1038/s41378-025-00937-z.
Wide-range vacuum sensors (0.1-10 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 10 Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 10 Pa to 10 Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.
宽量程真空传感器（0.1 - 10 Pa）对于多种应用至关重要，特别是在半导体设备中。然而，现有的传感器通常在测量范围和精度之间面临权衡，一些传感器提供宽量程但以低精度为代价，而另一些则在有限范围内提供高精度。这限制了它们在先进技术中的适用性。主要挑战在于中等真空下的灵敏度限制、低真空下的精度限制以及对气体类型的依赖性。在本研究中，提出了一种基于高性能宽量程微机电系统（MEMS）膜片的真空传感器新范式，其本质上体积小且与气体类型无关。该传感器基于双自由度弱耦合谐振器测量真空压力，该谐振器以两种不同模式工作。在0.3 Pa至10 Pa范围内，它以模式局域化模式工作，其中振幅比作为输出以提高灵敏度和分辨率。对于10 Pa至10 Pa的压力范围，它以传统谐振模式工作，频率作为输出以实现高精度。实验结果表明，所提出的传感器性能优于传统真空传感器。
