Xu Shaohang, Zhou Na, Shi Meng, Zhang Chenchen, Chen Dapeng, Mao Haiyang
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.
University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2022 Jun 14;13(6):945. doi: 10.3390/mi13060945.
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.
真空设备有着广泛的应用，为满足实际应用，对这类设备进行真空监测很有必要。皮拉尼传感器利用空气密度对气体热传导的影响，使敏感结构的温度发生变化，从而检测周围环境的压力，进而实现真空监测。在过去几十年里，微机电系统（MEMS）皮拉尼传感器因其结构简单、使用寿命长、测量范围广和灵敏度高的优点而受到广泛关注并得到实际应用。本文系统地总结并比较了不同类型的MEMS皮拉尼传感器。讨论了不同类型MEMS皮拉尼传感器的结构、材料、工作原理和性能，包括基于热敏电阻、热电偶、二极管和表面声波的传感器。此外，还研究了基于纳米多孔材料、碳纳米管和石墨烯等功能材料的新型皮拉尼传感器的发展现状，并探讨了MEMS皮拉尼传感器未来可能的发展方向。本文旨在聚焦于MEMS皮拉尼传感器的一般知识，从而激发对其实际应用的研究。
