Yu Sheng, Huang Xianfeng, Sun Jiangkun, Xie Peng, Lu Kun, Zhang Yongmeng, Wu Xuezhong, Xiao Dingbang
National University of Defense Technology, Changsha, 410073, China.
Microsyst Nanoeng. 2025 May 22;11(1):102. doi: 10.1038/s41378-025-00872-z.
The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the frequency mismatch of MSRG can fundamentally be reduced by mechanical trimming. However, it is challenged by the precise characterization. Previous studies about the characterization of frequency mismatch are almost based on frequency spectrum analysis and sweeping, which can only meet the requirement of trimming efficiency of over 100 mHz, limited by the signal noise and temperature drift. In this paper, a novel characterization method of frequency mismatch based on the quadrature-control force under the self-precession mode is proposed to meet the requirement of high-precision mechanical trimming. Furthermore, the phase errors which affect the accuracy of characterization is analyzed, and methods for the correction of phase errors are proposed. Based on this characterization method, 0.32 mHz frequency mismatch of micro-shell resonator is achieved by mechanical trimming, which is the best-reported performance for mechanical trimming of MEMS gyroscopes so far. More importantly, this novel characterization method can be applied for other kinds of resonators which can be mechanical trimmed.
制造过程中材料缺陷和几何误差引起的频率失配是限制微壳谐振器陀螺仪（MSRG）性能的关键因素。与其他微机电系统陀螺仪相比，MSRG的频率失配可通过机械微调从根本上降低。然而，这受到精确表征的挑战。以往关于频率失配表征的研究几乎都基于频谱分析和扫描，受信号噪声和温度漂移的限制，只能满足超过100 mHz的微调效率要求。本文提出了一种基于自进动模式下正交控制力的频率失配新型表征方法，以满足高精度机械微调的要求。此外，分析了影响表征精度的相位误差，并提出了相位误差校正方法。基于这种表征方法，通过机械微调实现了微壳谐振器0.32 mHz的频率失配，这是迄今为止微机电系统陀螺仪机械微调的最佳报道性能。更重要的是，这种新型表征方法可应用于其他可进行机械微调的谐振器。
