Arif Muhammad, Liu Xu, Jia Hangwei, Yang Zhihua, Hou Xueling, Pan Shilie
Research Center for Crystal Materials, CAS Key Laboratory of Functional Materials and Devices for Special Environmental Conditions, Xinjiang Key Laboratory of Functional Crystal Materials, Xinjiang Technical Institute of Physics and Chemistry, CAS, 40-1 South Beijing Road, Urumqi, 830011, China.
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
Small. 2025 Jul;21(29):e2500633. doi: 10.1002/smll.202500633. Epub 2025 May 23.
Deep-ultraviolet (UV) birefringent materials are urgently needed for advancing light polarization in deep-UV lithography. In crystal engineering, maximizing anisotropy by classical template alteration demonstrates its efficiency in achieving superior performance characteristics. Consequently, a novel planar deep-UV functional building unit (FBU), [CONH], is proposed, acquired by amino modulation within the urea template. This article presents a methodical investigation of novel fluoroborate [(CONH)BF] (AUBF), designed by unifying a planar π-conjugated functional cation with a fully fluorinated non-π-conjugated tetrahedron in a single system. The compound exhibits well-balanced properties, owing to its parallel molecular arrangement, and has been characterized as a high-performing deep-UV birefringent material. As is known to all, it is the first semi-organic urea-based compound to reach the deep-UV region with a cutoff edge at 196 nm, and a substantial birefringence of 0.127@546 nm, similar to that of the previously reported urea-based compounds as well as commercial birefringent crystal α-BBO (0.123@546 nm). This work not only identifies a novel birefringent gene with improved optical anisotropy but also opens the door for synthesizing novel deep-UV birefringent materials via a structural regulation design strategy.
深紫外(UV)双折射材料对于推进深紫外光刻中的光偏振至关重要。在晶体工程中,通过经典模板改变来最大化各向异性证明了其在实现卓越性能特征方面的有效性。因此,通过尿素模板内的氨基调制获得了一种新型平面深紫外功能构建单元(FBU)[CONH]。本文对新型氟硼酸盐[(CONH)BF](AUBF)进行了系统研究,该化合物通过在单一体系中将平面π共轭功能阳离子与全氟非π共轭四面体结合设计而成。由于其平行的分子排列,该化合物表现出平衡的性能,并被表征为一种高性能的深紫外双折射材料。众所周知,它是第一种基于半有机尿素的化合物,截止边在196nm,在546nm处具有0.127的显著双折射,与先前报道的基于尿素的化合物以及商业双折射晶体α-BBO(在546nm处为0.123)相似。这项工作不仅确定了一种具有改善光学各向异性的新型双折射基因,还为通过结构调控设计策略合成新型深紫外双折射材料打开了大门。