Liu Bin, Meng Lingchen, Lu Shuaishuai, Wang Fei, Liu Pengbo, Yan Peng
Shandong Key Laboratory of CNC Machine Tool Functional Components, School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China.
Key Laboratory of High-Efficiency and Clean Mechanical Manufacture, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China.
Micromachines (Basel). 2025 Apr 30;16(5):548. doi: 10.3390/mi16050548.
A novel over-constrained XYθ nano-positioning stage with a high load-bearing capacity is proposed. This serially connected displacement stage adopts an embedded structural design that integrates a translation stage with a rotation stage in series. The Z-axis amplification mechanism employs out-of-plane actuation, realising a compact solution for three-axis independent motion. The hybrid amplification mechanism designed in the translation stage ensures enhanced output displacement and structural stiffness. The hybrid-parallel amplification mechanism comprises a lever-type displacement amplifier and a Scott-Russell displacement amplifier connected in series, which is then connected in parallel with a bridge-type displacement amplifier. An over-constrained mechanism is introduced to impose redundant constraints along the Z-axis, effectively suppressing parasitic displacement in the Z-direction while enhancing resistance to out-of-plane deformation. A quasi-static model of the XYθ motion stage was established to comprehensively characterise the deformation behaviour of the stage, which was verified by finite element simulations and experiments on the prototype. The experimental results indicate that the XYθ stage achieves a large motion range (up to 152.22 μm × 151.3 μm × 2.885 mrad) while maintaining excellent anti-deformation capability 200 nm at 4 kg loading.
提出了一种新型的具有高承载能力的过约束XYθ纳米定位平台。这种串联连接的位移平台采用嵌入式结构设计，将平移平台和旋转平台串联集成。Z轴放大机构采用平面外驱动，实现了一种用于三轴独立运动的紧凑解决方案。在平移平台中设计的混合放大机构确保了输出位移和结构刚度的增强。混合-并联放大机构包括一个串联连接的杠杆式位移放大器和一个斯科特-拉塞尔位移放大器，然后与一个桥式位移放大器并联连接。引入了一种过约束机构，沿Z轴施加冗余约束，有效抑制Z方向的寄生位移，同时增强对平面外变形的抵抗力。建立了XYθ运动平台的准静态模型，以全面表征该平台的变形行为，并通过有限元模拟和原型实验进行了验证。实验结果表明，XYθ平台在4kg负载下保持200nm的优异抗变形能力的同时，实现了较大的运动范围（高达152.22μm×151.3μm×2.885mrad）。
