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具有输入/输出导向约束的压电驱动三维桥式放大机构的设计与建模

Design and modeling of a piezo-driven three-dimensional bridge-type amplification mechanism with input/output guiding constraint.

作者信息

Zhou Kuiyong, Liu Pengbo, Lu Shuaishuai, Yan Peng

机构信息

School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China.

Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Shandong University), Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong 250061, China.

出版信息

Rev Sci Instrum. 2022 Feb 1;93(2):025005. doi: 10.1063/5.0076287.

DOI:10.1063/5.0076287
PMID:35232159
Abstract

Owing to the limited stroke of piezo stacks, compliant amplification mechanisms are widely employed to magnify the displacement of piezoelectric actuators for emerging applications in precision engineering. In this study, a three-dimensional (3D) bridge-type amplification mechanism composed of two serially connected bridge-type amplifiers with a novel constraint form has been developed. The parallel guiding beams mounted at the input and output ends significantly increase the lateral stiffness and minimize parasitic displacements for higher accuracy. Furthermore, a new theoretical model is established to predict the magnification behavior of the 3D amplifier that takes into account the displacement loss caused by the coupling of the two bridge-type amplifiers. The accuracy of this model and the mechanical performance of the developed amplifier are verified by conducting finite element simulations and experimental studies on the manufactured prototypes.

摘要

由于压电叠堆的行程有限,柔顺放大机构被广泛应用于放大压电致动器的位移,以满足精密工程中新兴应用的需求。在本研究中,开发了一种三维(3D)桥式放大机构,它由两个串联的具有新型约束形式的桥式放大器组成。安装在输入端和输出端的平行导向梁显著提高了横向刚度,并将寄生位移降至最低,从而实现更高的精度。此外,还建立了一个新的理论模型来预测3D放大器的放大行为,该模型考虑了两个桥式放大器耦合引起的位移损失。通过对制造的原型进行有限元模拟和实验研究,验证了该模型的准确性和所开发放大器的机械性能。

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