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用于表面形态和温度测绘的高分辨率测温施密特扫描激光雷达

High-Resolution Thermometric Scheimpflug LiDAR for Surface Morphology and Temperature Mapping.

作者信息

Huang Xuhui, Janjua Raheel Ahmed, He Sailing

机构信息

Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China.

National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou 310058, China.

出版信息

Micromachines (Basel). 2025 May 18;16(5):590. doi: 10.3390/mi16050590.

Abstract

Common surface temperature measurement techniques, when applied to monitoring the temperature of surfaces with complex morphology, suffer from reduced spatial resolution, which compromises the measurement accuracy of the system. To improve the spatial resolution of temperature measurement technology and maintain high temperature sensitivity, we designed a microscopic morphology thermometric LiDAR (MMTL) system based on the Scheimpflug principle, which realizes the real-time restoration of the 3D morphology and temperature of the surface of micro-structured objects. The 3D spatial resolution of the system is better than 3 μm. The theoretical resolution of the self-designed reflective spectrometer can reach 0.9 nm, which improves the sensitivity and accuracy of the upconversion hybrid nanomaterials thermometry based on the intensity ratio. In the wide temperature range of 373.15-508.15 K, the highest relative temperature sensitivity can reach 2.07%/K, the optimal temperature resolution is 0.0131 K, and the error is less than 1 K. Finally, the temperature change trend of the mold surface under different heating voltages is accurately restored. The MMTL system can provide accurate temperature distribution data and hotspot location identification for scenarios such as optimizing thermal management design and real-time risk monitoring, and it has application potential in industrial manufacturing and for electronic products.

摘要

常见的表面温度测量技术在应用于监测具有复杂形态的表面温度时,存在空间分辨率降低的问题,这会影响系统的测量精度。为了提高温度测量技术的空间分辨率并保持高温度灵敏度,我们基于Scheimpflug原理设计了一种微观形态测温激光雷达(MMTL)系统,该系统实现了微结构物体表面三维形态和温度的实时恢复。系统的三维空间分辨率优于3μm。自行设计的反射光谱仪的理论分辨率可达0.9nm,提高了基于强度比的上转换混合纳米材料测温的灵敏度和精度。在373.15 - 508.15K的宽温度范围内,最高相对温度灵敏度可达2.07%/K,最佳温度分辨率为0.0131K,误差小于1K。最后,准确恢复了不同加热电压下模具表面的温度变化趋势。MMTL系统可为优化热管理设计和实时风险监测等场景提供准确的温度分布数据和热点位置识别,在工业制造和电子产品领域具有应用潜力。

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