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基于静电微机电系统扫描镜的眼动追踪系统的设计与性能评估

The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror.

作者信息

Li Minqiang, Qin Lin, Wang Xiasheng, Wen Jiaojiao, Wu Tong, Huang Xiaoming, Yin Hongbo, Tian Yi, Wang Zhuqing

机构信息

School of Electronic Engineering, Chengdu Technological University, Chengdu 610031, China.

School of Mechanical Engineering, Sichuan University, Chengdu 610065, China.

出版信息

Micromachines (Basel). 2025 May 28;16(6):640. doi: 10.3390/mi16060640.

Abstract

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology.

摘要

在本文中,我们提出了一种具有小尺寸和高扫描频率的眼动追踪系统,该系统利用通过微机电系统(MEMS)工艺制造的静电双轴扫描镜。激光束照射到镜子上,镜子的两个轴在人造眼球内产生李萨如图形扫描模式。从眼球反射的扫描模式由线性光电二极管传感器阵列(LPSA)检测。人造眼球的方向和旋转角度导致LPSA检测到的一系列像素上的灰度值变化,其中平均灰度值相应改变。通过对同一眼球运动方向的不同旋转角度与相应灰度值进行线性拟合,我们可以确定眼球运动方向与LPSA接收到的信号幅度之间的相关性,从而实现精确的眼动追踪。结果表明,最小分辨率为0.6°。这一初步结果表明该系统具有良好的准确性。未来,这种眼动追踪系统可以集成到各种可穿戴眼镜设备中,并应用于包括医学和心理学在内的各个领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6050/12195049/a8b25ceefa9e/micromachines-16-00640-g001.jpg

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