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具有飞秒激光打印纳米孔阵列的高灵敏度表面增强拉曼散射基底

High Sensitivity SERS Substrate with Femtosecond Laser-Printed Nanohole Arrays.

作者信息

Zhang Yunfang, Liu Dejun, Liu Han, Deng Yubin, Bai Zhiyong, Liao Changrui, Wang Yiping, Wang Ying

机构信息

Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China.

Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

出版信息

Sensors (Basel). 2025 Jun 12;25(12):3680. doi: 10.3390/s25123680.

Abstract

This article presents a novel method for fabricating repeatable and uniform surface-enhanced Raman scattering (SERS) substrates. The proposed method consists of two steps: (1) the fabrication of nanohole arrays using advanced femtosecond laser-induced two-photon polymerization (TPP) technology; and (2) the deposition of 9 nm thick silver nanoparticles on the nanohole arrays. The proposed nanohole arrays were optimized at the diameter, and the thickness of the silver film at two parameters. Regarding SERS substrates, a limit of detection of 10 M (rhodamine 6G) and analytical enhancement factors up to 3.5 × 10 were achieved. At 1361 cm, the relative standard deviation (RSD) of the characteristic peak was 5.5%, demonstrating a highly reproducible SERS substrate.

摘要

本文提出了一种制造可重复且均匀的表面增强拉曼散射(SERS)基底的新方法。所提出的方法包括两个步骤:(1)使用先进的飞秒激光诱导双光子聚合(TPP)技术制造纳米孔阵列;(2)在纳米孔阵列上沉积9纳米厚的银纳米颗粒。所提出的纳米孔阵列在直径和银膜厚度这两个参数上进行了优化。对于SERS基底,实现了10⁻⁶ M(罗丹明6G)的检测限和高达3.5×10⁵的分析增强因子。在1361 cm⁻¹处,特征峰的相对标准偏差(RSD)为5.5%,表明该SERS基底具有高度的可重复性。

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