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自支撑多晶金刚石膜的机械和电学性能

Mechanical and Electrical Properties of Free-standing Polycrystal Diamond Membranes.

作者信息

Wang Chenyu, Shinyavskiy Dmitry, Suter Luke, Altikriti Zubaida, Jia Quanxi, Muehle Matthias, Seo Jung-Hun

机构信息

Department of Materials Design and Innovation, University at Buffalo, The State University of New York, Buffalo, NY, 14260.

Fraunhofer USA Inc, Center Midwest, East Lansing, MI, 48824, USA.

出版信息

Adv Sci (Weinh). 2025 Aug;12(32):e03986. doi: 10.1002/advs.202503986. Epub 2025 Jun 28.

Abstract

In this study, we demonstrate a novel approach for synthesizing free-standing and transferable polycrystalline diamond membranes (PCDm) to overcome these constraints, thus enabling a much wider spectrum of applications. Two types of PCDm cantilevers -Top-Surface-Up (TSU) and Bottom-Surface-Up (BSU) are fabricated, each with two different sets of dimensions: 150 µm (width) × 1200 µm (length) and 300 µm (width) × 2000 µm (length). Their mechanical and electrical properties are systematically investigated. Atomic Force Microscopy (AFM) analysis revealed that TSU-PCDm has a higher elastic modulus than BSU-PCDm, attributed to differences in grain size and defect distribution. Despite these differences, all PCDms in our work exhibit consistently high modulus values with minimal mechanical degradation across various cantilever geometries. Bandgap measurements using X-ray Photoelectron Spectroscopy (XPS) and UV-vis absorption spectroscopy indicated a lower bandgap for TSU-PCDm due to boron incorporation, while BSU-PCDm exhibited a higher bandgap due to increased hydrogen content. Electrical characterization showed that the sheet resistance of TSU-PCDm decreases under strain, whereas BSU-PCDm maintains stable resistance. These findings unveil the material properties of PCDm and their potential usage for myriad diamond-based electronic applications.

摘要

在本研究中,我们展示了一种合成独立且可转移的多晶金刚石膜(PCDm)的新方法,以克服这些限制,从而实现更广泛的应用。制造了两种类型的PCDm悬臂梁——顶面朝上(TSU)和底面朝上(BSU),每种都有两组不同的尺寸:150微米(宽度)×1200微米(长度)和300微米(宽度)×2000微米(长度)。系统地研究了它们的机械和电学性能。原子力显微镜(AFM)分析表明,TSU-PCDm的弹性模量高于BSU-PCDm,这归因于晶粒尺寸和缺陷分布的差异。尽管存在这些差异,但我们工作中的所有PCDm在各种悬臂梁几何形状下都表现出始终如一的高模量值,且机械降解最小。使用X射线光电子能谱(XPS)和紫外可见吸收光谱进行的带隙测量表明,由于硼的掺入,TSU-PCDm的带隙较低,而由于氢含量增加,BSU-PCDm的带隙较高。电学表征表明,TSU-PCDm的薄层电阻在应变下降低,而BSU-PCDm保持稳定的电阻。这些发现揭示了PCDm的材料特性及其在众多基于金刚石的电子应用中的潜在用途。

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