Luo Guoxi, Zhang Haoyu, Liu Delai, Li Wenyan, Li Min, Li Zhikang, Sun Lin, Yang Ping, Maeda Ryutaro, Zhao Libo
State Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an 710049, China.
Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai 264000, China.
Sensors (Basel). 2025 Jul 4;25(13):4182. doi: 10.3390/s25134182.
Traditional PMUT ultrasonic ranging systems usually possess a large measurement blind area under the integrated transmit-receive mode, dramatically limiting its distance measurement in confined spaces, such as when determining the clearance of large bearing components. Here, a broadband PMUT rangefinder was designed by integrating six types of different cells with adjacent resonant frequencies into an array. Through overlapping and coupling of the bandwidths from the different cells, the proposed PMUTs showed a wide -6 dB fractional bandwidth of 108% in silicon oil. Due to the broadening of bandwidth, the device could obtain the maximum steady state with less excitation (5 cycles versus 14 cycles) and reduce its residual ring-down (ca. 6 μs versus 15 μs) compared with the traditional PMUT array with the same cells, resulting in a small blind area. The pulse-echo ranging experiments demonstrated that the blind area was effectively reduced to 4.4 mm in air or 12.8 mm in silicon oil, and the error was controlled within ±0.3 mm for distance measurements up to 250 mm. In addition, a specific ultrasound signal processing circuit with functions of transmitting, receiving, and processing ultrasonic waves was developed. Combining the processing circuit and PMUT device, the system was applied to determine the axial clearance of the main bearing in a tunneling machine. This work develops broadband PMUTs with a small blind area and high resolution for distance measurement in narrow and confined spaces, opening up a new path for ultrasonic ranging technology.
传统的压电微机电系统(PMUT)超声测距系统在集成收发模式下通常具有较大的测量盲区,这极大地限制了其在狭窄空间中的距离测量,比如在确定大型轴承部件的间隙时。在此,通过将六种具有相邻谐振频率的不同单元集成到一个阵列中,设计了一种宽带PMUT测距仪。通过不同单元带宽的重叠和耦合,所提出的PMUT在硅油中显示出108%的宽 -6 dB分数带宽。由于带宽的拓宽,与具有相同单元的传统PMUT阵列相比,该器件在较少激励(5个周期对比14个周期)下就能获得最大稳态,并减少其残余振铃(约6 μs对比15 μs),从而产生较小的盲区。脉冲回波测距实验表明,在空气中盲区有效减小到4.4 mm,在硅油中为12.8 mm,对于高达250 mm的距离测量,误差控制在±0.3 mm以内。此外,还开发了一种具有发射、接收和处理超声波功能的特定超声信号处理电路。将处理电路与PMUT器件相结合,该系统被应用于确定隧道掘进机主轴承的轴向间隙。这项工作开发了具有小盲区和高分辨率的宽带PMUT,用于狭窄和受限空间中的距离测量,为超声测距技术开辟了一条新路径。