Wijekoon Sudu Hakuruge Dilan Priyankara, Ono Kosuke, Shimomura Masaru, Kawaguchi Takahiko, Sakamoto Naonori, Wakiya Naoki
Graduate School of Science and Technology, Shizuoka University, Hamamatsu, Japan.
Graduate School of Integrated Science and Technology, Department of Engineering, Shizuoka University, Hamamatsu, Japan.
Sci Technol Adv Mater. 2025 Jul 14;26(1):2518747. doi: 10.1080/14686996.2025.2518747. eCollection 2025.
The anatase form of TiO₂ is a widely studied material due to its broad range of applications. Epitaxial anatase thin films have attracted significant attention because of their enhanced electrical and optical properties. However, fabricating anatase thin films remains challenging due to their metastability and the need for highly sophisticated fabrication techniques. On-site controlled hydrolysis is a simple, cost-effective, and rapid method for producing smooth, compact thin films on various surfaces. In this study, we demonstrate a straightforward approach to fabricating highly oriented epitaxial anatase thin films on LaAlO₃ substrates using different solvent mixtures. The epitaxial orientation and film quality were analyzed using X-ray diffraction pole figures and rocking curves, while surface morphology was characterized by Scanning electron microscopy and atomic force microscopy. Our results indicate that thin film quality and morphology are primarily influenced by the annealing temperature rather than the choice of solvent or titanium precursor, confirming the feasibility of a scalable, low-cost epitaxial fabrication technique for anatase thin films.
二氧化钛的锐钛矿型因其广泛的应用而成为一种被广泛研究的材料。外延锐钛矿薄膜因其增强的电学和光学性能而备受关注。然而，由于其亚稳定性以及对高度复杂制造技术的需求，制备锐钛矿薄膜仍然具有挑战性。原位控制水解是一种在各种表面上制备光滑、致密薄膜的简单、经济高效且快速的方法。在本研究中，我们展示了一种使用不同溶剂混合物在LaAlO₃衬底上制备高度取向外延锐钛矿薄膜的直接方法。使用X射线衍射极图和摇摆曲线分析外延取向和薄膜质量，同时通过扫描电子显微镜和原子力显微镜表征表面形貌。我们的结果表明，薄膜质量和形貌主要受退火温度影响，而非溶剂或钛前驱体的选择，这证实了一种用于锐钛矿薄膜的可扩展、低成本外延制造技术的可行性。
