Li Mengfan, Tao Kai, Lu Jinghan, Xu Shenyue, Sun Yuanyuan, Chen Yaman, Liu Zhiyong
School of Materials Science and Engineering, Henan Institute of Technology, Xinxiang 453003, China.
Engineering Research Center for Metallic Materials Modification Technology of Henan Province, Henan Institute of Technology, Xinxiang 453003, China.
Materials (Basel). 2025 Jul 19;18(14):3389. doi: 10.3390/ma18143389.
The flexible transparent conductive films (TCFs) of a ZnS/Cu/Ag/TiO multilayered structure were deposited on a flexible PET substrate with high surface roughness using magnetic sputtering, and the effects of structural characteristics on the performance of the films were analyzed. The TCFs with TiO/Cu/Ag/TiO and ZnS/Cu/Ag/ZnS symmetric structures were also prepared for comparison. The TCF samples were deposited using ZnS, TiO, Cu and Ag targets, and they were analyzed using scanning electronic microscopy, atomic force microscopy, grazing incidence X-ray diffraction, spectrophotometry and a four-probe tester. The TCFs exhibit generally uniform surface morphology, excellent light transmittance and electrical conductivity with optimized structure. The optimal values are 84.40%, 5.52 Ω/sq and 33.19 × 10 Ω for the transmittance, sheet resistance and figure of merit, respectively, in the visible spectrum. The satisfactory properties of the asymmetric multilayered TCF deposited on a rough-surface substrate should be mainly attributed to the optimized structure parameters and reasonable interfacial compatibilities.
采用磁控溅射法在具有高表面粗糙度的柔性聚对苯二甲酸乙二酯（PET）基底上沉积了ZnS/Cu/Ag/TiO多层结构的柔性透明导电薄膜（TCFs），并分析了结构特性对薄膜性能的影响。还制备了具有TiO/Cu/Ag/TiO和ZnS/Cu/Ag/ZnS对称结构的TCFs用于比较。使用ZnS、TiO、Cu和Ag靶材沉积TCF样品，并通过扫描电子显微镜、原子力显微镜、掠入射X射线衍射、分光光度法和四探针测试仪对其进行分析。优化结构的TCFs呈现出总体均匀的表面形貌、优异的透光率和导电性。在可见光谱中，透光率、方块电阻和品质因数的最佳值分别为84.40%、5.52Ω/sq和33.19×10Ω。沉积在粗糙表面基底上的非对称多层TCF的良好性能应主要归因于优化的结构参数和合理的界面相容性。
