Wang Lyuyan, Zhao Jiahao, You Zheng
Department of Precision Instrument, Tsinghua University, Beijing, 100084, PR China.
Key Laboratory of Smart Microsystem, Ministry of Education, Beijing, 100084, PR China.
Microsyst Nanoeng. 2025 Aug 12;11(1):150. doi: 10.1038/s41378-025-00997-1.
The rapid growth of the Internet of Things (IoT) and embodied intelligence has increased the demand for sensor nodes that conserve energy and reduce data transmission, especially in resource-limited applications that rely heavily on sensors. Event-based sensors have emerged to meet this demand by reducing data redundancy and lowering power consumption. Within this domain, MEMS (Micro-Electro-Mechanical Systems) inertial switches stand out as promising alternatives to traditional commercial accelerometers and gyroscopes, catering to the widespread need for inertial sensing. This review categorizes the key aspects for optimizing the performance of MEMS inertial switches, with a focus on threshold sensitivity, directional responsiveness, and contact performance. It explores the technological pathways for achieving these objectives and highlights the wide-ranging applications of MEMS inertial switches, especially in scenarios characterized by energy constraints, large-scale deployments, and harsh environments. Additionally, the current challenges faced in the field are analyzed, and future research directions are proposed to enhance the versatility and integration of MEMS inertial switches, thereby promoting their broader adoption and utility.
物联网（IoT）和具身智能的迅速发展，增加了对节能和减少数据传输的传感器节点的需求，特别是在严重依赖传感器的资源受限应用中。基于事件的传感器应运而生，通过减少数据冗余和降低功耗来满足这一需求。在这一领域，微机电系统（MEMS）惯性开关作为传统商用加速度计和陀螺仪的有前途的替代品脱颖而出，满足了对惯性传感的广泛需求。本综述对优化MEMS惯性开关性能的关键方面进行了分类，重点关注阈值灵敏度、方向响应性和接触性能。它探索了实现这些目标的技术途径，并强调了MEMS惯性开关的广泛应用，特别是在能源受限、大规模部署和恶劣环境的场景中。此外，分析了该领域目前面临的挑战，并提出了未来的研究方向，以增强MEMS惯性开关的通用性和集成性，从而促进其更广泛的采用和应用。
