Wang Jinyu, Hu Heming, Yang Dong, Wang Weipeng, Wang Shuxiao, Wang Chenxi, Wang Qing, Yue Wencheng, Cai Yan
Opt Express. 2025 Feb 10;33(3):4499-4509. doi: 10.1364/OE.545232.
This paper presents an aperiodic optical phased array (OPA) based on a dual-layer emission grating on a SiN-on-SOI platform. The dual-layer grating offers advantages in terms of integration process feasibility and large process tolerance. A particle swarm optimization algorithm was employed to optimize the emission array. The proposed OPA demonstrates a wide field of view (FOV) and high sidelobe suppression ratio (SLSR). Experimental verification was performed on an 8-inch silicon photonics integration manufacturing platform capable of industrial production, and the device performance matched well with simulation results. The test results indicate that the OPA achieved a FOV of 150° × 16° with a divergence angle of 0.022° × 0.060°. The overall optimal SLSR was 10.3 dB, with a minimum SLSR of 3.7 dB across the entire field of view. Furthermore, the OPA was used in frequency modulation continuous wave system to achieve a distance measurement of 40 m.
本文介绍了一种基于硅基绝缘体上氮化硅(SiN-on-SOI)平台上的双层发射光栅的非周期光学相控阵(OPA)。双层光栅在集成工艺可行性和大工艺容差方面具有优势。采用粒子群优化算法对发射阵列进行优化。所提出的OPA具有宽视场(FOV)和高旁瓣抑制比(SLSR)。在具备工业生产能力的8英寸硅光子集成制造平台上进行了实验验证,器件性能与仿真结果匹配良好。测试结果表明,OPA实现了150°×16°的视场,发散角为0.022°×0.060°。整体最优旁瓣抑制比为10.3 dB,在整个视场内最小旁瓣抑制比为3.7 dB。此外,该OPA用于调频连续波系统,实现了40 m的距离测量。