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环形腔垂直腔面发射激光器:增强光束质量和无散斑照明。

Annular cavity VCSELs: enhanced beam quality and speckle-less illumination.

作者信息

Yan Wenbo, Alkhazragi Omar, Lu Hang, Al Ibrahim Redha H, Wang Yue, Lin Heming, Banda Yara, Melinte Georgian, Ng Tien Khee, Ooi Boon S

出版信息

Opt Express. 2025 Mar 10;33(5):9539-9550. doi: 10.1364/OE.545235.

Abstract

Vertical-cavity surface-emitting lasers (VCSELs) are valued for their high coupling efficiency, directionality, and low cost. Broad-area (BA)-VCSEL, in particular, offers the possibility of a customizable degree of spatial coherence and high output power for low-speckle imaging, illumination, communication, and augmented reality technologies. However, new designs of BA-VCSEL for scalable fabrication need to be developed. In this study, we present an annular cavity method for engineering optical characteristics and spatial coherence of VCSELs by altering the transverse shape of their cavities. Our experimental and simulation results reveal that annular VCSELs, with a doughnut shape, exhibit higher optical power density and lower threshold current due to more efficient utilization of gain medium compared to conventional BA-VCSELs. Notably, the annular VCSEL with a 20-µm radius central hole achieves a maximum optical power density of 1.09 kW/cm with a significant increase in external quantum efficiency (21.9%), outperforming the conventional BA-VCSEL (0.596 kW/cm and 16.1%). Spatial coherence analysis indicates that the designed annular VCSEL produces speckle patterns with lower intensity variations, enabling a higher number of mutually incoherent modes. The annular cavity design effectively achieves both low spatial coherence and Q-factor spoiling.

摘要

垂直腔面发射激光器(VCSEL)因其高耦合效率、方向性和低成本而受到重视。特别是大面积(BA)-VCSEL,为低散斑成像、照明、通信和增强现实技术提供了可定制的空间相干度和高输出功率的可能性。然而,需要开发用于可扩展制造的BA-VCSEL新设计。在本研究中,我们提出了一种环形腔方法,通过改变VCSEL腔的横向形状来设计其光学特性和空间相干性。我们的实验和模拟结果表明,具有甜甜圈形状的环形VCSEL由于比传统BA-VCSEL更有效地利用增益介质,表现出更高的光功率密度和更低的阈值电流。值得注意的是,具有20-μm半径中心孔的环形VCSEL实现了1.09 kW/cm的最大光功率密度,外部量子效率显著提高(21.9%),优于传统BA-VCSEL(0.596 kW/cm和16.1%)。空间相干分析表明,设计的环形VCSEL产生的散斑图案强度变化较小,能够实现更多相互不相干的模式。环形腔设计有效地实现了低空间相干性和品质因数恶化。

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