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具有用户定义变迹的绝缘体上铌酸锂光栅耦合器的逆向设计

Inverse design of high-efficiency lithium-niobate-on-insulator grating couplers with user-defined apodization.

作者信息

Zhan Biyan, Zhang Haoxuan, Liu Xianwen

出版信息

Opt Express. 2025 Mar 10;33(5):11221-11230. doi: 10.1364/OE.547934.

Abstract

Grating couplers typically encounter minimum feature size (MFS) constraints in fabrication. To address this issue, we incorporated user-defined apodization profiles into the inverse design process to enhance conversion efficiency (CE). We optimized grating parameters based on lithium-niobate on insulator (LNOI) platforms. With a single-step lithography and etching process, we achieved a remarkable peak CE of -1.97 dB at an MFS of 200 nm in the telecom C-band. This result surpasses previous LNOI designs that lack complex structures, such as bottom metal reflectors or overlaid materials, offering a more straightforward path for developing high-efficiency LNOI grating couplers. Leveraging this design strategy, we also demonstrated a broadband grating coupler with a peak CE of -3.22 dB and 3-dB bandwidth over 106 nm.

摘要

光栅耦合器在制造过程中通常会遇到最小特征尺寸(MFS)的限制。为了解决这个问题,我们在逆向设计过程中纳入了用户定义的变迹轮廓,以提高转换效率(CE)。我们基于绝缘体上铌酸锂(LNOI)平台优化了光栅参数。通过单步光刻和蚀刻工艺,我们在电信C波段200纳米的最小特征尺寸下实现了-1.97分贝的显著峰值转换效率。这一结果超越了以往缺乏复杂结构(如底部金属反射器或覆盖材料)的LNOI设计,为开发高效LNOI光栅耦合器提供了一条更直接的途径。利用这种设计策略,我们还展示了一种宽带光栅耦合器,其峰值转换效率为-3.22分贝,3分贝带宽超过106纳米。

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