Cui Meng, Zhen Liyun, Bai Xingyu, Yu Lihan, Chen Xuhao, Liu Jingquan, Liu Qingkun, Yang Bin
National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
Nanomicro Lett. 2025 Aug 25;18(1):43. doi: 10.1007/s40820-025-01894-y.
Pipelines are extensively used in environments such as nuclear power plants, chemical factories, and medical devices to transport gases and liquids. These tubular environments often feature complex geometries, confined spaces, and millimeter-scale height restrictions, presenting significant challenges to conventional inspection methods. Here, we present an ultrasonic microrobot (weight, 80 mg; dimensions, 24 mm × 7 mm; thickness, 210 μm) to realize agile and bidirectional navigation in narrow pipelines. The ultrathin structural design of the robot is achieved through a high-performance piezoelectric composite film microstructure based on MEMS technology. The robot exhibits various vibration modes when driven by ultrasonic frequency signals, its motion speed reaches 81 cm s at 54.8 kHz, exceeding that of the fastest piezoelectric microrobots, and its forward and backward motion direction is controllable through frequency modulation, while the minimum driving voltage for initial movement can be as low as 3 V. Additionally, the robot can effortlessly climb slopes up to 24.25° and carry loads more than 36 times its weight. The robot is capable of agile navigation through curved L-shaped pipes, pipes made of various materials (acrylic, stainless steel, and polyvinyl chloride), and even over water. To further demonstrate its inspection capabilities, a micro-endoscope camera is integrated into the robot, enabling real-time image capture inside glass pipes.
管道广泛应用于核电站、化工厂和医疗设备等环境中,用于输送气体和液体。这些管状环境通常具有复杂的几何形状、狭窄的空间以及毫米级的高度限制,给传统检测方法带来了重大挑战。在此,我们展示了一种超声微型机器人(重量80毫克;尺寸24毫米×7毫米;厚度210微米),以实现在狭窄管道中的灵活双向导航。该机器人的超薄结构设计是通过基于MEMS技术的高性能压电复合薄膜微结构实现的。当由超声频率信号驱动时,该机器人呈现出各种振动模式,其在54.8千赫兹时的运动速度达到81厘米/秒,超过了最快的压电微型机器人,并且其向前和向后的运动方向可通过调频控制,而初始运动的最小驱动电压可低至3伏。此外,该机器人能够轻松攀爬高达24.25°的斜坡,并能承载超过其重量36倍的负载。该机器人能够在弯曲的L形管道、由各种材料(丙烯酸、不锈钢和聚氯乙烯)制成的管道中,甚至在水面上灵活导航。为了进一步展示其检测能力,将一个微型内窥镜摄像头集成到机器人中,能够在玻璃管道内进行实时图像采集。