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用于高性能柔性应变传感器的液态金属精密气溶胶喷射微图案化

Precision aerosol-jet micropatterning of liquid metal for high-performance flexible strain sensors.

作者信息

Xu Benyan, Yang Mingyang, Cheng Wenjun, Li Xuyin, Xu Ximei, Li Wenming, Zhang Hao, Zhou Ming

机构信息

State Key Laboratory of Clean and Efficient Turbomachinery Power Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China.

Key Laboratory for Advanced Materials Processing Technology, Ministry of Education, Beijing, China.

出版信息

Nat Commun. 2025 Aug 25;16(1):7920. doi: 10.1038/s41467-025-63023-y.

Abstract

Flexible wearable strain sensors are rapidly advancing non-invasive devices, while achieving both an ultra-low detection limit and wide sensing range concurrently presents a challenge. Herein, we propose a liquid metal (LM) strain sensors manufacturing strategy employing aerosol jet printing (AJP). Specially formulated LM ink is the key to enabling high-precision printing (12 μm) of LM via AJP, which is optimized by adjusting the concentration of polyvinylpyrrolidone and diethylene glycol. Additionally, through structured sensor pattern design in conjunction with narrow line width AJP, flexible LM strain sensors are developed that feature an ultralow detection limit (0.1% for l-sinusoid and 0.0033% for s wave LM strain sensors) combined with a wide sensing range (660% for l-sinusoid and 230% for s wave). Exceptional performance achieves comprehensive detection of human movement. This research reconciles the trade-off between detection limit and sensing range, while high-precision LM Aerosol-jet Micro-patterning enhances manufacturing in flexible electronics.

摘要

柔性可穿戴应变传感器是快速发展的非侵入式设备,然而同时实现超低检测限和宽传感范围是一项挑战。在此,我们提出一种采用气溶胶喷射印刷(AJP)制造液态金属(LM)应变传感器的策略。经过特殊配方的LM油墨是通过AJP实现LM高精度印刷(12μm)的关键,通过调整聚乙烯吡咯烷酮和二甘醇的浓度对其进行了优化。此外,通过结构化传感器图案设计并结合窄线宽AJP,开发出了柔性LM应变传感器,其具有超低检测限(正弦波LM应变传感器为0.1%,s波为0.0033%)和宽传感范围(正弦波为660%,s波为230%)。卓越的性能实现了对人体运动的全面检测。本研究协调了检测限和传感范围之间的权衡,同时高精度的LM气溶胶喷射微图案化增强了柔性电子器件的制造。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34df/12378984/8e95d603a51d/41467_2025_63023_Fig1_HTML.jpg

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