Ma Chao, Ye Huaidong, Shi Xiaowei, Chen Yufan, Liu Yuxuan, Qin Longhui, Gan Lanyue, Xia Fan, Long Guanhua, Jiang Xijun, Huang Weicheng, Chen Xingxing, Liang Xuelei, Peng Lian-Mao, Hu Youfan
Key Laboratory for the Physics and Chemistry of Nanodevices and School of Electronics, Peking University, Beijing, China.
Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan, Hunan, China.
Nat Commun. 2025 Aug 29;16(1):8034. doi: 10.1038/s41467-025-63018-9.
Pressure sensors, especially the typical capacitive sensors that feature low power consumption, have drawn considerable interest in emerging and rapidly growing fields such as flexible electronics and humanoid robots, but often suffer from limited performance. Here, we report a contact-dominated design for capacitive pressure sensors to dramatically improve the sensing response and linearity over a broad pressure range. This design is implemented by utilizing hierarchical microstructured electrodes made of robust conductive composites with metallic coverage and layered dielectrics with high unit-area capacitance to realize localized electric-displacement-field-enhanced capacitance change. We demonstrate a significant improvement in pressure response beyond 3000 and a sensing range exceeding 1 MPa, particularly with a near-linear response (optimized R of 0.9998) and high sensitivity of 9.22 kPa in a wide pressure range of 0-100 kPa. Moreover, we present that the integration of the contact-dominated sensor with floating-gate low-dimensional semiconductor transistors can provide a transduced electrical response of ~4 × 10 at a low operating voltage of 2.66 V due to the greatly enhanced pressure response. We also demonstrate the potential applications of our sensor in fluid physical property evaluation and precise dynamic control of a robotic arm for manipulation tasks.
压力传感器，尤其是具有低功耗特点的典型电容式传感器，在诸如柔性电子和人形机器人等新兴且快速发展的领域引起了广泛关注，但往往存在性能受限的问题。在此，我们报道了一种用于电容式压力传感器的接触主导型设计，以在宽压力范围内显著提高传感响应和线性度。这种设计是通过利用由具有金属覆盖层的坚固导电复合材料制成的分层微结构电极以及具有高单位面积电容的分层电介质来实现局部电场增强电容变化而得以实施的。我们展示了压力响应显著提高到超过3000，传感范围超过1兆帕，特别是在0至100千帕的宽压力范围内具有近线性响应（优化后的R为0.9998）以及9.22千帕的高灵敏度。此外，我们还表明，由于压力响应大大增强，将接触主导型传感器与浮栅低维半导体晶体管集成后，在2.66伏的低工作电压下可提供约4×10的转换电响应。我们还展示了我们的传感器在流体物理性质评估以及用于操作任务的机器人手臂精确动态控制方面的潜在应用。
