Ma Yuan, Wang Sen, Guo Zhuobin, Wang Xiao, Ma Yuxin, Fu Yinghua, Liu Hanqing, Li Shengwei, Lu Yao, Yuan Zhizhang, Wu Zhong-Shuai
State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023, China.
University of Chinese Academy of Sciences, Beijing 100049, China.
Natl Sci Rev. 2025 Jul 28;12(9):nwaf302. doi: 10.1093/nsr/nwaf302. eCollection 2025 Sep.
The burgeoning Internet of Things demands highly customizable microbatteries (MBs) to power miniaturized electronics, yet challenges exist in fabricating ultra-small MBs and integrating customizable modules within confined areas. Herein, we report a novel photolithographic microfabrication strategy enabling the large-scale production of monolithic integrated ultra-small MBs. The approach utilizes photoresist grooves as micropattern templates and employs a non-destructive mechanical peeling process to fabricate precise MBs with a compact area of 2.2275 mm by using LiV(PO) as both the cathode and the anode. These MBs demonstrate an exceptional areal capacity of 96.4 μAh cm and remarkable cycling stability, retaining 88.3% of their initial capacity after 10 000 cycles. Furthermore, the method allows the facile serial integration of numerous MBs in a single step, achieving a record voltage of 182.7 V through 63 series-connected units. This breakthrough provides a scalable solution for mass-producing customizable MBs, advancing the power supply capabilities for miniature electronics with high energy density and long-term reliability.
蓬勃发展的物联网需要高度可定制的微型电池（MBs）来为小型化电子产品供电，但在制造超小型MBs以及在有限区域内集成可定制模块方面仍存在挑战。在此，我们报告了一种新颖的光刻微制造策略，可实现大规模生产单片集成超小型MBs。该方法利用光刻胶凹槽作为微图案模板，并采用无损机械剥离工艺，以LiV(PO) 作为阴极和阳极，制造出面积紧凑、为2.2275平方毫米的精确MBs。这些MBs展现出96.4 μAh/cm² 的出色面积容量和卓越的循环稳定性，在10000次循环后仍保留其初始容量的88.3%。此外，该方法允许在一步中轻松地将多个MBs进行串联集成，通过63个串联单元实现了创纪录的182.7 V电压。这一突破为大规模生产可定制MBs提供了一种可扩展的解决方案，提升了具有高能量密度和长期可靠性的微型电子产品的供电能力。
