Huang Ruoyao, Chen Tingxuan, Zhu Ling, Li Kwai Hei
School of Microelectronics, Southern University of Science and Technology, Shenzhen, 518055, China.
College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China.
Microsyst Nanoeng. 2025 Sep 5;11(1):168. doi: 10.1038/s41378-025-00998-0.
Tactile sensors are crucial in robotics and medical diagnostics, requiring precise real-time detection. However, the development of a compact sensor that can measure force across a wide range, with high resolution and rapid response along three axes, remains extremely limited. Herein, an opto-electro-mechanical tactile sensor is reported, utilizing a monolithically integrated GaN-based optochip with a fingerprint-patterned polydimethylsiloxane (PDMS) film. The sensor exhibits a linear response over a broad measurement range of ±100 mN for shear force and 0-200 mN for normal force, with a detection resolution of 0.07 mN. It also demonstrates fast response and recovery times of 0.85 ms and 0.82 ms, respectively. Experimental verification of its application in surface topography scanning and organ lesion assessment highlights its potential for enhancing robotic perception and medical diagnosis.
触觉传感器在机器人技术和医学诊断中至关重要，需要精确的实时检测。然而，能够在宽范围内测量力、具有高分辨率并沿三个轴快速响应的紧凑型传感器的开发仍然极为有限。在此，报道了一种光机电触觉传感器，它利用了具有指纹图案的聚二甲基硅氧烷（PDMS）薄膜与单片集成的基于GaN的光芯片。该传感器在±100 mN的剪切力和0 - 200 mN的法向力的宽测量范围内呈现线性响应，检测分辨率为0.07 mN。它还分别展示了0.85 ms和0.82 ms的快速响应和恢复时间。其在表面形貌扫描和器官病变评估中的应用的实验验证突出了其在增强机器人感知和医学诊断方面的潜力。
