高分辨率扫描透射电子显微镜术

Wall J, Langmore J, Isaacson M, Crewe A V

Proc Natl Acad Sci U S A. 1974 Jan;71(1):1-5. doi: 10.1073/pnas.71.1.1.

We have shown that a scanning transmission electron microscope with a high brightness field emission source is capable of obtaining better than 3 A resolution using 30 to 40 keV electrons. Elastic dark field images of single atoms of uranium and mercury are shown which demonstrate this fact as determined by a modified Rayleigh criterion. Point-to-point micrograph resolution between 2.5 and 3.0 A is found in dark field images of micro-crystallites of uranium and thorium compounds. Furthermore, adequate contrast is available to observe single atoms as light as silver.

我们已经表明，配备高亮度场发射源的扫描透射电子显微镜能够使用30至40keV电子获得优于3埃的分辨率。展示了铀和汞单原子的弹性暗场图像，这些图像通过修正的瑞利准则证明了这一事实。在铀和钍化合物微晶的暗场图像中发现了2.5至3.0埃的点对点显微照片分辨率。此外，有足够的对比度来观察像银一样轻的单原子。