Linders P W, Stols A L, van de Vorstenbosch R A, Stadhouders A M
Scan Electron Microsc. 1982(Pt 4):1603-15.
In the quantitative electron probe X-ray microanalysis of thin specimens the total mass thickness of a specimen is often required to express the elemental content as fractions of the total mass. In the present paper three methods for the measurement of mass thickness of thin specimens are reviewed and compared as to their applicability for use in quantitative X-ray microanalysis. The methods are based on the use of the continuum X-ray intensity, the backscattered electron intensity, and the transmitted electron intensity, respectively. From experimental results, it is concluded that the mass measurement method, based on the transmitted electron intensity, gives more accurate mass values than does the continuum X-ray method. The use of an independent mass measurement method is advantageous when low temperature oxygen plasma ashing is applied to lower X-ray analysis detection limits. In this way, elements present in ashed specimens can be expressed as fractions of the original specimen mass.
在薄试样的定量电子探针X射线微分析中，常常需要知道试样的总质量厚度，以便将元素含量表示为总质量的分数。本文综述并比较了三种测量薄试样质量厚度的方法，以及它们在定量X射线微分析中的适用性。这些方法分别基于连续X射线强度、背散射电子强度和透射电子强度。从实验结果可以得出结论，基于透射电子强度的质量测量方法比连续X射线方法能给出更准确的质量值。当采用低温氧等离子体灰化来降低X射线分析检测限时，使用独立的质量测量方法是有利的。通过这种方式，灰化试样中存在的元素可以表示为原始试样质量的分数。
