Crawford C K
Scan Electron Microsc. 1980(4):11-25.
The use of low energy ion charge neutralization to stabilize surface potentials in scanning microscopes leads to the observation of new effects. Among the most important of these, are effects which result from the primary beam being scanned in a raster. A new theory which describes raster charge-up for highly insulating specimens is presented. It is shown that the required neutralizing ion current is a surprisingly strong function of the primary electron current, the raster parameters, specimen parameters, and magnification. Contrary to intuition, the required ion current is not linearly related to the primary electron current. Methods of adjusting parameters to achieve better ion charge neutralization are discussed.
在扫描显微镜中使用低能离子电荷中和来稳定表面电位会带来新效应的观测。其中最重要的效应是由在光栅中扫描的一次束所导致的效应。本文提出了一种描述高绝缘标本光栅充电的新理论。结果表明，所需的中和离子电流是一次电子电流、光栅参数、标本参数和放大倍数的惊人强函数。与直觉相反，所需离子电流与一次电子电流并非线性相关。本文还讨论了调整参数以实现更好的离子电荷中和的方法。
