Micromachined analyzers on a silicon chip.

For an example of a silicon-based micromachined analyzer, we describe a combined PO2, PCO2, and pH sensor designed for extracorporeal blood gas monitoring. The clinically well-accepted amperometric (PO2) and potentiometric (PCO2, pH) sensing principles are used, realized in a planar and miniaturized form on a single silicon chip (6 x 22 mm). The transducer part of the chip is fabricated by standard silicon technology. Polyacrylamide and polysiloxane polymeric layers, which are used as internal electrolyte and gas-permeable membrane, respectively, are deposited and patterned by photopolymerization. The entire sensor is fabricated on the wafer level by using integrated-circuit-compatible processes, thus allowing mass production. By integrating a flow-through channel directly on the chip, the sample size and the reagent consumption are substantially reduced. The device was characterized in aqueous solutions and in blood intended for transfusion. The sensor has a typical sensitivity of 0.36 nA/mmHg (PO2), -39 mV/decade (PCO2), and 51 mV/pH (pH); low drift; and a functional lifetime of > 2 months. The analytical precision in the physiologically expected range is better than 2 mmHg for the PO2 and PCO2 sensor, and 0.02 pH unit for the pH sensor.