Miniaturized detectors for a chemical analysis system.

Recently, several studies about miniaturized chemical analysis systems fabricated with micromachining methods were reported. These systems have some advantages, such as fast response, small amount of sample, and low consumption of reagents, as compared with the conventional system. With such a small system, design of the detector units is very important to monitor analytical performance. This paper introduces some examples of micromachined detectors for miniaturized chemical analysis systems.